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Micro-crack Detection in Silicon Solar Wafer through Optimal Parameter Selection in Anisotropic Diffusion Filter  

Seo, Hyoung Jun (Graduate school, Korea National University of Transportation)
Kim, Gyung Bum (Aeronautical & Mechanical Design Engineering, Korea National University of Transportation)
Publication Information
Journal of the Semiconductor & Display Technology / v.13, no.3, 2014 , pp. 61-67 More about this Journal
Abstract
Micro-cracks in crystalline silicon wafer often result in wafer breakage in solar wafer manufacturing, and also their existence may lead to electrical failure in post fabrication inspection. Therefore, the reliable detection of micro-cracks is of importance in the photovoltaic industry. In this paper, an experimental method to select optimal parameters in anisotropic diffusion filter is proposed. It can reliably detect micro-cracks by the distinct extension of boundary as well as noise reduction in near-infrared image patterns of micro-cracks. Its performance is verified by experiments of several type cracks machined.
Keywords
Anisotropic diffusion filter; Design of experiment; Defect detection; Micro-crack; Silicon solar wafer;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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