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A Study on the Creative Design of Pulling Module for Silicon Ingot and an Apparatus of Manufacturing Silicon Single Crystal Ingot by using TRIZ(6SC)  

Hong, Sung Do (Korea University of Technology and Education)
Huh, Yong Jeong (Korea University of Technology and Education)
Publication Information
Journal of the Semiconductor & Display Technology / v.11, no.2, 2012 , pp. 39-43 More about this Journal
Abstract
This paper presents a study on the design of a pulling module for silicon ingot and an apparatus of manufacturing silicon single crystal ingot using the same method. The pulling module is conceptually designed by using TRIZ. Czochralski method(CZ) is representative way to manufacture single crystal ingot for wafers. The seed can be broken by high tension which is caused by large weight of a silicon ingot. The solution of this problem has been derived using 6SC(6 steps creativity)TRIZ. The pulling module is actuated by DC motor and rollers. High tension in the seed is removed by the rotate-elevate motion of rollers in the pulling module. A rubber belt is included in the rotate-elevate mechanism for increasing friction between rollers and silicon ingot.
Keywords
Czochralski method(CZ); TRIZ; 6SC; Silicon Ingot; Contradiction; Tension;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
1 한국반도체연구조합 "반도체로 움직이는 세상", 2008.
2 주대영 "반도체산업의 2020 비전과 전략", 2007
3 김효준, "생각의 창의성 TRIZ" 지혜, 2004.
4 김호종, "6 단계 창의성을 적용한 실용트리즈", 두양사, 2006
5 임사환, 허용정, "6SC 와 Q-TRIZ 를 응용한 RPS-TRIZ" 한국산학기술학회, pp. 635, 2011
6 홍성도, 임사환, 허용정, "TRIZ(6SC)를 활용한 솔라 플라워의 창의적설계" , 반도체디스플레이 기술학회지, 2011. 6
7 홍성도, 손준호, 임사환, 허용정, "TRIZ 를 활용한 솔라플라워의 창의적 설계" 2010년 한국 실천공학교육학회 학술발표대회 논문집, Vol.2, No.1, pp. 5-10, 2010.
8 한국 트리즈 협회, "Business TRIZ", 교보문고, 2009.
9 정다해, 이경원, 정찬근, "트리즈 100 배활용하기" 두양사, 2007.