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Two Step Surface Texturing of Silicon Wafers using Micro Blaster  

Cho, Chan-Seob (School of EE, Kyungpook Nat'l Univ.)
Jung, Sang-Hoon (Graduate School of EECS, Kyungpook Nat'l Univ.)
Publication Information
Journal of the Semiconductor & Display Technology / v.9, no.3, 2010 , pp. 5-9 More about this Journal
Abstract
Recently, the important issues of solar cell are low cost and high efficiency. Making low cost and high efficiency solar cell, there are many effects to development of inexpensive wafer, simplify process and improve optical, electrical properties. In this the study, the 2 step texturing method using micro blaster was developed to decrease reflection of incident lights. Air bridge electrode structure is suggested to expand the effective surface area and decrease the series resistance of finger electrode. The effects of 1 step texturing and 2 step texturing by micro blaster are compared. Reflectance of 1 step and 2 step texturing are measured 28.7% and 25.5%, respectively. The reflectance of 2 step texturing sample is lower about 3.2% than 1 step textured sample.
Keywords
solar cell; DRE; micro blaster; texturing;
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