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| 1 |
A Destruction Pattern Analysis of a Turbo-Molecular Pump According to the Foreline Clamp Damage in an ICP Dry Etcher for 300 mm Wafers
Jeong, Jinyong;Lee, Intaek;Joo, Junghoon;
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The Korean Vacuum Society
, v.24, no.2, pp.27-32,
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| 2 |
The Effect of Anodizing on the Electrical Properties of ZrO2 Coated Al Foil for High Voltage Capacitor
Chen, Fei;Park, Sang-Shik;
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The Korean Vacuum Society
, v.24, no.2, pp.33-40,
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| 3 |
Effect of Oxygen Flux on FTO Thin Films Using DC and RF Sputtering
Park, Eun Mi;Lee, Dong Hoon;Suh, Moon Suhk;
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The Korean Vacuum Society
, v.24, no.2, pp.41-46,
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