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| 1 |
A Study on the Mismatch of Time and Frequency Domain for Vibration Criteria of Sensitive Equipment
이홍기;김강부;백재호;
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The Korean Society Of Semiconductor & Display Technology
, v.1, no.1, pp.1-7,
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| 2 |
Fabrication of 8 inch Polyimide-type Electrostatic Chuck
조남인;박순규;설용태;
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The Korean Society Of Semiconductor & Display Technology
, v.1, no.1, pp.9-13,
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| 3 |
A Study on Wafer Level Vacuum Packaging using Epi poly for MEMS Applications
석선호;이병렬;전국진;
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The Korean Society Of Semiconductor & Display Technology
, v.1, no.1, pp.15-19,
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| 4 |
A Study on the PID Control Gain Selection Scheme of a High-Speed/High-Accuracy position Control System using Taguchi Method
신호준;채호철;한창수;
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The Korean Society Of Semiconductor & Display Technology
, v.1, no.1, pp.21-28,
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| 5 |
Studies on Flip Chip Underfill Process by using Molding System
한세진;정철화;차재원;서화일;김광선;
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The Korean Society Of Semiconductor & Display Technology
, v.1, no.1, pp.29-33,
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| 6 |
Measurement of Monodisperse Particle Charging in Unmagnetized and Magnetized Plasmas
한장식;안강호;김곤호;
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The Korean Society Of Semiconductor & Display Technology
, v.1, no.1, pp.35-40,
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| 7 |
Analysis for Design of a High Vacuum Turbomolecular Pump
이우영;국정한;박종권;구본학;
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The Korean Society Of Semiconductor & Display Technology
, v.1, no.1, pp.41-45,
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| 8 |
리소그라피의 최신기술동향
안진호;
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The Korean Society Of Semiconductor & Display Technology
, v.1, no.1, pp.47-56,
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| 9 |
PFC 대체가스 에칭기술
나까무라모리타가;
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The Korean Society Of Semiconductor & Display Technology
, v.1, no.1, pp.57-63,
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