Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Numerical Simulation of Thermal Plume Flow and Fume Particle Dispersion in High-Precision Laser Machining Process

정밀 레이저 가공의 열플룸 유동에 따른 흄 분진입자 산포 특성 열유동해석 연구

  • Chanyeong Jeon (School of Mechanical System Engineering, Kumoh National Institute of Technology) ;
  • Kyoungjin Kim (School of Mechanical System Engineering, Kumoh National Institute of Technology)
  • 전찬영 (국립금오공과대학교 기계시스템공학부) ;
  • 김경진 (국립금오공과대학교 기계시스템공학부)
  • Received : 2024.09.05
  • Accepted : 2024.09.12
  • Published : 2024.09.30
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Abstract

In high-precision laser machining process in semiconductor and display device manufacturing, thermal plume may arise from high heating zone around laser application point and it may significantly affect the surface contamination by micron-sized fume dust particles in laser surface machining. The present numerical study investigates this thermal plume flow by employing three-dimensional large eddy simulations and also fume dust particle dispersion through particle tracing techniques. The numerical results show the laminar to turbulent transition characteristics of buoyant thermal plume and fume dust particles rising and falling on the machining surface. The influences of laser power on surface scattering of fume dust particles are closely examined for the dust particle size ranging from 10 to 90 ㎛.

Keywords

Acknowledgement

이 연구는 금오공과대학교 대학 학술연구비로 지원되었다(2022-2023년도).

References

  1. Dubey, A. K. and Yadava, V., "Laser Beam Machining - A Review," International Journal of Machine Tools and Manufacture, Vol. 48, pp. 609-628, 2008.
  2. Shin, Y. C., Wu, B., Lei, S., Cheng, G. J., and Yao, Y. L., "Overview of Laser Applications in Manufacturing and Materials Processing in Recent Years," Journal of Manufacturing Science and Engineering, Vol. 142, pp. 110818, 2020.
  3. Orazi, L., Romoli, L., Schmidt, M., and Li, L., "Ultrafast Laser Manufacturing: from Physics to Industrial Applications," CIRP Annals-Manufacturing Technology, Vol. 70, pp. 543-566, 2021.
  4. Powell, J., CO2 Laser Cutting, 2ndEd., Springer-Verlag: London, 1998.
  5. Vassie. R., Roach, R. J., Tyrer, J. R., and Sharp, B. L., ''Fumes Generated During Laser Processing of Polyvinyl Chloride (PVC),'' Optics and Laser Technology, Vol. 27, pp. 31-37, 1995.
  6. Kim, K., "A Study on Dispersion Behaviors of Fume Particles in Laser Cutting Process of Optical Plastic Thin Films," Journal of the Semiconductor and Display Technology, Vol. 18, pp. 62-68, 2019.
  7. Zohuri, B., Thermal Effects of High Power Laser Energy on Materials, Springer-Verlag, 2021.
  8. Kim, K., "Downward and Upward Air Flow Effects on Fume Particle Dispersion in Laser Line Cutting of Optical Plastic Films," Journal of the Semiconductor and Display Technology, Vol. 19, pp. 37-44, 2020.
  9. Kim, K., "Numerical Simulation on Dispersion of Fume Micro-Particles by Particle Suction Flows in Laser Surface Machining," Journal of the Semicon-ductor and Display Technology, Vol. 22, pp. 1-6, 2023.
  10. Ly, S. and Rubenchik, A. M., Khairallah, S. A., Guss, G., and Matthews, M. J., "Metal Vapor Micro-Jet Controls Material Redistribution in Laser Powder Bed Fusion Additive Manufacturing," Scientific Reports, Vol. 7, pp. 4085, 2017.
  11. Yan, Z. H., "Large Eddy Simulations of a Turbulent Thermal Plume," Heat and Mass Transfer, Vol. 43, pp. 503-514, 2007.
  12. Haider, A. and Levenspiel, O., "Drag Coefficient and Terminal Velocity of Spherical and Nonspherical Particles," Powder Technology, Vol. 58, pp. 63-70, 1989.