센서학회지 (Journal of Sensor Science and Technology)

  • 제33권5호
  • /
  • Pages.338-343
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  • 2024
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  • 1225-5475(pISSN)
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  • 2093-7563(eISSN)
한국센서학회 (The Korean Sensors Society)
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InGaZnO Thin-Film Transistor-based pH Sensor with Parylene-C Gate Dielectric

  • Gwang-Eun Choi (School of Electrical and Computer Engineering, University of Seoul) ;
  • Min-Joon Kim (School of Electrical and Computer Engineering, University of Seoul) ;
  • Ra-Yeong Park (School of Electrical and Computer Engineering, University of Seoul) ;
  • Yoon Kim (School of Electrical and Computer Engineering, University of Seoul) ;
  • Dong-Wook Park (School of Electrical and Computer Engineering, University of Seoul)
  • 투고 : 2024.08.07
  • 심사 : 2024.09.01
  • 발행 : 2024.09.30
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초록

The measurement of pH is of significant importance in chemistry, life sciences, and environmental monitoring. Unlike conventional pH sensors that utilize glass electrodes, thin-film transistor (TFT)-based pH sensors offer distinct advantages, including enhanced response speed and additional circuit functions. In this study, we developed a pH sensor that incorporates biocompatible parylene-C as both the substrate and sensing layer, thereby enhancing flexibility, transparency, and biological compatibility. We conducted tests to measure the voltage-current characteristics of the pH solutions and assessed their performance in terms of drift and hysteresis. Using InGaZnO (IGZO) as the channel material, our pH sensor demonstrated an average sensitivity of approximately 82 mV/pH, albeit with certain drift limitations. The initial pH measurements exhibited good reversibility over time. IGZO- and parylene-C-based TFT pH sensors are well suited for various applications, including wearable health monitoring, owing to their flexibility and biocompatibility.

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과제정보

This work was supported by the 2023 Sabbatical Year Research Grant from the University of Seoul. It is also partly supported by Korea Institute for Advancement of Technology (KIAT) grant funded by the Korea Government (MOTIE) (P0017011, HRD Program for Industrial Innovation).

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