Acknowledgement
This work was supported by the Technology Innovation Program (20015975, Development of an apparatus for probe head based on High Precision 3 Axis Loader) funded By the Ministry of Trade, Industry & Energy(MOTIE, Korea). This work was also supported by Hankuk University of Foreign Studies Research Fund of 2024.
References
- J. KIM, "New Wafer Alignment Process Using Multiple Vision Method for Industrial Manufacturing," Electronics, vol.7, no.3, 2018.
- M. Cong, X. Kong, Y. Du, J. Liu, "Wafer Pre-Aligner System Based on Vision Information Processing," Information Technology Journal, vol.6, no.8, pp.1245-1251, 2007.
- C. Chen, C. Huang, C. Yeh, W. Chang, "An accelerating CPU based correlation-based image alignment for real-time automatic optical inspection," Computers & Electrical Engineering, vol.49, pp.207-220, Jan. 2016.
- B.A. Draper, J.R. Beveridge, A.P.W. Bohm, C. Ross and M. Chawathe, "Implementing image applications on FPGAs," in Proc. of 2002 International Conference on Pattern Recognition, vol.3, pp.265-268, 2002.
- C. T. Johnston, K. T. Gribbon, and D. G Bailey, "Implementing Image Processing Algorithms on FPGAs," in Proc. of the Eleventh Electronics New Zealand Conference, ENZCon'04, pp.118-123, 2004.
- C. Zhao, C. Cheung, and M. Liu, "Integrated polar microstructure and template-matching method for optical position measurement," Optics Express, vol.26, vol.4, pp.4330-4345, 2018.
- W. Ouyang, F. Tombari, S. Mattoccia, L. Di Stefano, W.K. Cham, "Performance Evaluation of Full Search Equivalent Pattern Matching Algorithms," IEEE Transactions on Pattern Analysis and Machine Intelligence, vol.34, no.1, pp.127-143, Jan. 2012.
- S. Mattoccia, F. Tombari, L. Di Stefano, "Efficient template matching for multi-channel images," Pattern Recognition Letters, vol.32, no.5, pp.694-700, Apr. 2011.
- W. Shou-Der, L. Shang-Hong, "Fast Template Matching Based on Normalized Cross Correlation With Adaptive Multilevel Winner Update," IEEE Transactions on Image Processing, vol.17, no.11, pp.2227-2235, Nov. 2008.
- S. Sassanapitak, P. Kaewtrakulpong, "An efficient translation-rotation template matching using pre-computed scores of rotated templates," in Proc. of 2009 6th International Conference on Electrical Engineering/Electronics, Computer, Telecommunications and Information Technology, ECTI-CON, pp.1040-1043, 2009.
- X. Cui, H. Kim, E. Park, H. Choi, "Robust and accurate pattern matching in fuzzy space for fiducial mark alignment," Machine Vision and Applications, vol.24, pp.447-459, 2013.
- Y. Zhang, Z. Zhang, S. Peng, D. Li, H. Xiao, C. Tang, R. Miao, L. Peng, "A rotation invariant template matching algorithm based on Sub-NCC," Mathematical Biosciences and Engineering, vol.19, no.9, pp.9505-9519, Jun. 2022.
- G. Kertesz, S. Szenasi and Z. Vamossy, "Performance measurement of a general multi-scale template matching method," in Proc. of 2015 IEEE 19th International Conference on Intelligent Engineering Systems (INES), pp.153-157, 2015.