Study on Fault Diagnosis and Data Processing Techniques for Substrate Transfer Robots Using Vibration Sensor Data

The maintenance of semiconductor equipment is crucial for the continuous growth of the semiconductor market. System management is imperative given the anticipated increase in the capacity and complexity of industrial equipment. Ensuring optimal operation of manufacturing processes is essential to maintaining a steady supply of numerous parts. Particularly, monitoring the status of substrate transfer robots, which play a central role in these processes, is crucial. Diagnosing failures of their major components is vital for preventive maintenance. Fault diagnosis methods can be broadly categorized into physics-based and data-driven approaches. This study focuses on data-driven fault diagnosis methods due to the limitations of physics-based approaches. We propose a methodology for data acquisition and preprocessing for robot fault diagnosis. Data is gathered from vibration sensors, and the data preprocessing method is applied to the vibration signals. Subsequently, the dataset is trained using Gradient Tree-based XGBoost machine learning classification algorithms. The effectiveness of the proposed model is validated through performance evaluation metrics, including accuracy, F1 score, and confusion matrix. The XGBoost classifiers achieve an accuracy of approximately 92.76% and an equivalent F1 score. ROC curves indicate exceptional performance in class discrimination, with 100% discrimination for the normal class and 98% discrimination for abnormal classes.