Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
권호 표지

An Experimental Study on IMP-based and DOB-based Controllers for Position Control of a BLDC Motor System

  • Dong Cheol Song (Department of Electrical Engineering, Myongji University ) ;
  • Seung Tae Hwang (Department of Electrical Engineering, Myongji University ) ;
  • Nebiyeleul Daniel Amare (Department of Electrical Engineering, Myongji University ) ;
  • Young Ik Son (Department of Electrical Engineering, Myongji University )
  • Received : 2024.06.05
  • Accepted : 2024.06.21
  • Published : 2024.06.30
Download PDF
⟨ Previous Next ⟩

Abstract

As semiconductor processes require several nanometers precision, the importance of motor control is increasing in semiconductor equipment. Due to unpredictable uncertainties such as friction and mechanical vibrations achieving precise position control in semiconductor processes is challenging. The internal model principle-based controller is a control technique that ensures robust steady-state performance by incorporating a model of the reference and disturbance. The disturbance observer-based controller is a prominent robust control technique implemented to cope with various nonlinearities and uncertainties. Provided that the two controllers can be designed to exhibit equivalent performance under certain conditions, this paper demonstrates through experiments that they yield identical results for the case of a BLDC position control problem. The experimental results also indicate that they can offer enhanced robustness compared with the conventional PID controller in the presence of a time-varying disturbance.

Keywords

Acknowledgement

This paper was conducted with the support of the Korea Institute for Advancement of Technology (G02P18800005502) through the 2024 Ministry Collaborative Semiconductor Main Track Project, and the authors would like to thank Professor S. J. Hong of Myongji University for his help in carrying out the research.

References

  1. S. Mishra, J. Coaplen, and M. Tomizuka, "Precision positioning of wafer scanners segmented iterative learning control for nonrepetitive disturbances [Applications of control]," IEEE Control Systems Magazine, vol. 27, no. 4, pp. 20-25, (2007). 
  2. K. C. Kim, J. J. Kim, Y. M. Choi, and D. G. Gweon, "Design of a hybrid controller to eliminate the force ripple in the linear motor," J. of the Semiconductor & Display Technology, vol. 7, no. 1, pp. 17-22, (2008). 
  3. S. C. Ko and K. B. Jin, "The mechanical characteristic analysis and improvement of precision position control system with AC servo motor and ball screw," J. of the Semiconductor & Display Technology, vol. 6, no. 1, pp. 31-36, (2007). 
  4. R. Yang, M. Wang, L. Li, Y. Zenggu, and J. Jiang, "Integrated uncertainty/disturbance compensation with second-order sliding-mode observer for PMLSM-driven motion stage," IEEE Trans. Power Electron., vol. 34, no. 3, pp. 2597-2607, (2019). 
  5. Y. Liu, J. Gao, Y. Zhong, and L. Zhang, "Extended state observer-based IMC-PID tracking control of PMLSM servo systems," IEEE Access, vol. 9, pp. 49036-49046, (2021). 
  6. Y. I. Son and I. H. Kim, "A robust state observer using multiple integrators for multivariable LTI systems," IEICE Trans. Fund. Electron., vol. E93-A, no. 5, pp. 981-984, (2010). 
  7. M. Ruderman, A. Ruderman, and T. Bertram, "Observer-based compensation of additive periodic torque disturbances in permanent magnet motors," IEEE Trans. Ind. Inf. vol. 9, no. 2, pp. 1130-1138, (2013). 
  8. Y. I. Son, I. H. Kim, D. S. Choi, and H. Shim, "Robust cascade control of electric motor drives using dual reduced-order PI observer," IEEE Trans. Ind. Electron., vol. 62, no. 6, pp. 3672-3682, (2015). 
  9. I. H. Kim and Y. I. Son, "Design of a low-order harmonic disturbance observer with application to a DC motor position control," energies, vol. 13, no. 5, pp. 1020, (2020). 
  10. Y. S. Cho, H. J. Choi, S. M. Jeon, J. H. Shin, J. Y. Lee, B. Lee, and Y. I. Son, "Trajectory tracking controller for semiconductor equipment motors based on PI observer," J. of the Semiconductor & Display Technology, vol. 22, no. 2, pp. 96-103, (2023). 
  11. B. A. Francis and W. M. Wonham, "The internal model principle of control theory," Automatica, vol. 12, no. 5, pp. 457-465, (1976). 
  12. Y. Joo, G. Park, J. Back, and H. Shim, "Embedding internal model in disturbance observer with robust stability," IEEE Trans. Autom. Control, vol. 61, no. 10, pp. 3128- 3133, (2016). 
  13. J. I. Yuz and M. E. Salgado, "From classical to state-feedback-based controllers," IEEE Control Systems Magazine, vol. 23, no. 4, pp. 58-67, (2003). 
  14. Y. I. Son and S. C. Lim, "A comparison of IMP-based and DOB-based controllers for a DC motor position control system," Trans. of KIEE, vol. 73, no. 2, pp. 343-348, (2024). 
  15. S. H. Kim, Motor Control, Bokdu Publisher, 5th ed., pp 156-159, (2024). 
  16. J. Yao, Z. Jiao, and D. Ma, "Adaptive robust control of DC motors with extended state observer," IEEE Trans. Ind, Electron., vol. 61, no. 7, pp. 3630-3636, (2014). 
  17. J. H. Yook, I. H. Kim, M. S. Han, and Y. I. Son, "Robustness improvement of DC motor speed control using communication disturbance observer under uncertain time delay," Electron. Lett., vol. 53, no. 6, pp. 389-391, (2017). 
  18. Y. I. Son and S. J. Yang, "" = 0: IMP-based controller," KIPE Magazine, vol. 26, no. 1, pp. 64-69, (2021). 
  19. G. F. Franklin, J. D. Powell, and A. Emami-Naeini, Feedback Control of Dynamic Systems, 6th ed., Pearson, (2010). 
  20. T. Kailath, Linear Systems, Prentice Hall, Inc., (1980). 
  21. EC-i 52 and ESCON 70/10 details. May 19, 2024, from https://www.maxongroup.com/maxon/view/product/633919, (2021). 
  22. Arduino Due details. May 19, 2024, from https://docs.arduino.cc/hardware/due/, (2024).