Acknowledgement
본 연구는 2021년도 산업통산자원부의 재원으로 한국에너지기술평가원(KETEP)의 지원과제인 "대면적 결정질/박막 실리콘 이종접합(HJT) 태양광 모듈 핵심소재 장비 공정 기술 개발"(No.20213030010240) 과제의 일환으로 수행되었습니다.
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