반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

스핀코팅 및 급속열처리 공정을 통해 형성된 Y2O3:Eu3+ 박막의 발광특성

Luminescent Properties of Y2O3:Eu3+ Thin Film Through Spin-coating and Rapid Thermal Annealing Process

  • 박재홍 (부경대학교 전기공학부 디스플레이반도체전공) ;
  • 정용석 (부경대학교 전기공학부 디스플레이반도체전공)
  • Jehong Park (Department of Electrical Engineering, Display & Semiconductor Engineering, Pukyong National University) ;
  • Yongseok Jeong (Department of Electrical Engineering, Display & Semiconductor Engineering, Pukyong National University)
  • 투고 : 2024.02.21
  • 심사 : 2024.03.20
  • 발행 : 2024.03.31
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초록

The europium doped yttrium oxide (Y2O3:Eu3+) thin film was formed on a Si substrate by the conventional spin-coating process followed by rapid thermal annealing (RTA) treatment. The spinning profiles such as rotation speed, acceleration and holding times were controlled during the spin-coating process for the best condition of the Y2O3:Eu3+ thin film. The RTA treatment was conducted for several temperature in order to crystallize the spin coated film. The Y2O3:Eu3+ thin film presented best performance in the conditions of 4000 rpm, 30 s and 10 s of rotation speed, acceleration time and holding time, respectively, at a fixed RTA temperature of 900 ℃.

키워드

과제정보

이 논문은 부경대학교 자율창의학술연구비(2023년)에 의하여 연구되었음.

참고문헌

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