Journal of Powder Materials (한국분말재료학회지)

The Korean Powder Metallurgy & Materials Institute (한국분말재료학회 (*구 분말야금학회))
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Fabrication of Ti-Mo Core-shell Powder and Sintering Properties for Application as a Sputtering Target

Ti-Mo 코어-쉘 분말 제조 및 소결 특성 연구

  • Won Hee Lee (Department of Materials Science and Engineering, Hanyang University) ;
  • Chun Woong Park (Department of Materials Science and Engineering, Hanyang University) ;
  • Heeyeon Kim (Department of Materials Science and Engineering, Hanyang University) ;
  • Yuncheol Ha (Department of Materials Science and Engineering, Hanyang University) ;
  • Jongmin Byun (Department of Materials Science and Engineering, Seoul National University of Science and Technology) ;
  • Young Do Kim (Department of Materials Science and Engineering, Hanyang University)
  • 이원희 (한양대학교 신소재공학부) ;
  • 박천웅 (한양대학교 신소재공학부) ;
  • 김희연 (한양대학교 신소재공학부) ;
  • 하윤철 (한양대학교 신소재공학부) ;
  • 변종민 (서울과학기술대학교 신소재공학과) ;
  • 김영도 (한양대학교 신소재공학부)
  • Received : 2024.01.10
  • Accepted : 2024.02.13
  • Published : 2024.02.28
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Abstract

In this study, a core-shell powder and sintered specimens using a mechanically alloyed (MAed) Ti-Mo powder fabricated through high-energy ball-milling are prepared. Analysis of sintering, microstructure, and mechanical properties confirms the applicability of the powder as a sputtering target material. To optimize the MAed Ti-Mo powder milling process, phase and elemental analyses of the powders are performed according to milling time. The results reveal that 20 h of milling time is the most suitable for the manufacturing process. Subsequently, the MAed Ti-Mo powder and MoO3 powder are milled using a 3-D mixer and heat-treated for hydrogen reduction to manufacture the core-shell powder. The reduced core-shell powder is transformed to sintered specimens through molding and sintering at 1300 and 1400℃. The sintering properties are analyzed through X-ray diffraction and scanning electron microscopy for phase and porosity analyses. Moreover, the microstructure of the powder is investigated through optical microscopy and electron probe microstructure analysis. The Ti-Mo core-shell sintered specimen is found to possess high density, uniform microstructure, and excellent hardness properties. These results indicate that the Ti-Mo core-shell sintered specimen has excellent sintering properties and is suitable as a sputtering target material.

Keywords

Acknowledgement

본 연구는 정부(산업통상자원부)의 재원으로 한국산업기술평가관리원의 지원을 받아 수행된 연구임(No. 20009856, 디스플레이용 고순도 Mo 및 Mo 합금 스퍼터링 타겟 기술 개발), 또한 이 논문은 2016년도 정부(교육부)의 재원으로 한국연구재단의 지원을 받아 수행된 기초연구사업임(2016R1A6A1A03013422).

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