Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Development of Uniform Ag Electrode and Heating Sensors Using Inkjet Printing Technology

잉크젯 프린팅 기술을 이용한 Ag 전극 균일성 및 발열 센서 연구

  • Gun Woong Kim (Department of Semiconductor Engineering, Gyeongsang National University) ;
  • Jaebum Jeong (Department of Semiconductor Engineering, Gyeongsang National University) ;
  • Jin Ho Park (Department of Semiconductor Engineering, Gyeongsang National University) ;
  • Woo Jin Jeong (Department of Semiconductor Engineering, Gyeongsang National University) ;
  • Jun Young Kim (Department of Semiconductor Engineering, Gyeongsang National University)
  • 김건웅 (경상국립대학교 반도체공학과) ;
  • 정재범 (경상국립대학교 반도체공학과) ;
  • 박진호 (경상국립대학교 반도체공학과) ;
  • 정우진 (경상국립대학교 반도체공학과) ;
  • 김준영 (경상국립대학교 반도체공학과)
  • Received : 2024.01.02
  • Accepted : 2024.01.18
  • Published : 2024.01.31
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Abstract

Inkjet printing technology is used to mass-produce displays and electrochemical sensors by dropping tens of pico-liters or less of specific-purpose ink through nozzles, just as ink is sprayed and printed on paper. Unlike the deposition method for vaporizing material in a vacuum, inkjet printing technology can be used for processing even under general atmospheric pressure and has a cost advantage because the material is dissolved in a solvent and used in the form of ink. In addition, because it can only be printed on the desired part, masks are not required. However, a technical shortcoming is the difficulty for commercialization, such as uniformity for forming the thickness and coffee ring effect. As sizes of devices decrease, the need to print electrodes with precision, thinness, and uniformity increases. In this study, we improved the printing and processing conditions to form a homogeneous electrode using Ag ink (DGP-45LT-15C) and applied this for patterning to fabricate a heat sensor. Upon the application of voltage to the heat sensor, the model with an extended width exhibited superior heat performance. However, in terms of sheet resistance, the model yielded an equivalent value of 21.6 Ω/□ compared to the ITO.

Keywords

Acknowledgement

이 성과는 정부(과학기술정보통신부)의 재원으로 한국연구재단의 지원을 받아 수행된 연구이다(No. 2022 R1F1A1074746, RS-2023-00222166). 또한 SDC-경상국립대학교 산학협력 센터 과제의 지원을 받아 수행한 연구이다.

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