Acknowledgement
본 연구는 산업통상자원부의 '화면크기 10인치급 초박형 유리의 건식 이온교환 기반 영속식 화학강화 공정기술 개발과제(no. 20015627)'의 지원으로 수행되었음.
References
- J. Bonse, S. Hohm, S. V. Kirner, A. Rosenfeld, and J. Kruger, "Laser-induced periodic surface structures -A scientific evergreen," IEEE J. Sel. Top. Quantum Electron. 23, 9000615 (2017).
- H. M. van Driel, J. E. Sipe, and J. F. Young, "Laser-induced periodic surface structure on solids: A universal phenomenon," Phys. Rev. Lett. 49, 1955-1958 (1982). https://doi.org/10.1103/PhysRevLett.49.1955
- A. Siegman and P. Fauchet, "Stimulated Wood's anomalies on laser-illuminated surfaces," IEEE J. Quantum Electron. 22, 1384-1403 (1986). https://doi.org/10.1109/JQE.1986.1073133
- S. Hohm, A. Rosenfeld, J. Kruger, and J. Bonse, "Area dependence of femtosecond laser-induced periodic surface structures for varying band gap materials after double pulse excitation," Appl. Surf. Sci. 278, 7-12 (2013). https://doi.org/10.1016/j.apsusc.2012.10.188
- M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, "Origin of laser-induced near-subwavelength ripples: Interference between surface plasmons and incident laser," ACS Nano 3, 4062-4070 (2009). https://doi.org/10.1021/nn900654v
- J. Bonse and J. Kruger, "Pulse number dependence of laser-induced periodic surface structures for femtosecond laser irradiation of silicon," J. Appl. Phys. 108, 034903 (2010).
- O. Varlamova, M. Bounhalli, and J. Reif, "Influence of irradiation dose on laser-induced surface nanostructures on silicon," Appl. Surf. Sci. 278, 62-66 (2013). https://doi.org/10.1016/j.apsusc.2012.10.140
- T. S. Park, E. S. Hwang, M. J. Kang, G. H. Baek, and B.-H. Cheong, "Order-disorder control of Si nanoparticles in laser-irradiated amorphous-Si thin film," Opt. Mater. 133, 112956 (2022).
- P. C. van der Wilt, "Excimer-laser annealing: Microstructure evolution and a novel characterization technique," SID Symp. Dig. Tech. Pap. 45, 149-152 (2014).
- C. W. Kim, J. G. Jung, J. B. Choi, D. H. Kim, C. Yi, H. D. Kim, Y. H. Choi, and J. Im, "LTPS backplane technologies for AMLCDs and AMOLEDs," SID Symp. Dig. Tech. Pap. 42, 862-865 (2011).
- M. J. Kang, T. S. Park, and B.-H. Cheong, "Scan-path dependence of surface ripples on Si thin films induced by laser irradiation with an asymmetric Gaussian beam," Opt. Laser Technol. 146, 107550 (2022).
- M. Kim, M. Kang, E. Hwang, O. Prudnikov, and B. Cheong, "Guided-mode resonance in periodic surface textures on Si thin films induced by nanosecond laser irradiation," Photonics Nanostruct.: Fundam. Appl. 45, 100923 (2021).
- M. Kang, E. Hwang, M. Kim, T. Park, S. Shin, and B. Cheong, "Enhancement of ultra-violet light absorption of surface-textured silicon induced by nanosecond laser irradiations," Appl. Surf. Sci. 530, 147260 (2020).
- E. S. Hwang, M. J. Kang, and B.-H. Cheong, "Resonance colors in an amorphous-Si thin layer irradiated by an ultraviolet nanosecond laser," AIP Adv. 12, 065323 (2022).
- A. Dostovalov, K. Bronnikov, V. Korolkov, S. Babin, E. Mitsai, A. Mironenko, M. Tutov, D. Zhang, K. Sugioka, J. Maksimovic, T. Katkus, S. Joudkazis, A. Zhizhchenko, and A. Kuchmizhak, "Hierarchical anti-reflective laser-induced periodic surface structures (LIPSSs) on amorphous Si films for sensing application," Nanoscale 12, 13431-13441 (2020). https://doi.org/10.1039/D0NR02182B
- M. G. Moharam and T. K. Gaylord, "Rigorous coupled-wave analysis of planar-grating diffraction," J. Opt. Soc. Am. 71, 811-818 (1981). https://doi.org/10.1364/JOSA.71.000811
- E. D. Palik, Handbook of Optical Constants of Solids (Academic Press, USA, 1985), Vol. 1.
- N. Choi, E. Kim, K. Nam, D. Kim, and B. Choi, "Evaluation of polycrystalline silicon after Excimer laser annealing by Retardation measurement method," SID Symp. Dig. Tech. Pap. 50, 885-887 (2019).
- L. Hong, X. Wang, Rusli, H. Wang, H. Zheng, and H. Yu, "Crystallization and surface texturing of amorphous-Si induced by UV laser for photovoltaic application," J. Appl. Phys. 111, 043106 (2012).