Journal of Practical Engineering Education (실천공학교육논문지)

Korean Institute for Pratical Engineering Education (한국실천공학교육학회)
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A Study on the Solution of Product Particle Attachment Problem using Practical TRIZ

실용 트리즈를 활용한 제품 Particle 부착 문제의 해결 방안 연구

  • Kyu-Han Jeong (Department of Management of Technology and Innovation, KOREATECH) ;
  • In-Kwang Song (Department of Management of Technology and Innovation, KOREATECH) ;
  • Jang-Hee Lee (School of Industrial Management, KOREATECH)
  • 정규한 (한국기술교육대학교 기술경영학과) ;
  • 송인광 (한국기술교육대학교 기술경영학과) ;
  • 이장희 (한국기술교육대학교 산업경영학부)
  • Received : 2023.04.04
  • Accepted : 2023.04.27
  • Published : 2023.04.30
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Abstract

In the external inspection and packaging stages of products used in the semiconductor manufacturing process, there is a problem in which particles are adsorbed to the product itself or a carrying tool due to electrostatic discharge. This study presents a methodology that can improve the problem of adsorption of particles to a product by using a practical TRIZ technique. By applying the proposed practical TRIZ-based methodology, the problem was defined, and contradictions caused by product waiting time were derived. Among the derived contradictions, physical contradictions were set and the concept of 'space separation' was applied to derive solutions such as 'installation of Ionizer' and 'improvement of the layout of the workroom'. As a result of the experiment by applying 'Ionizer Installation' and 'Workroom Layout Improvement' derived through the application of practical TRIZ, it was confirmed that the particle adsorption problem that occurs during the waiting time of the product can be solved.Through this study, it is expected that workers, facility engineers, and technical engineers working at manufacturing processes will be able to effectively solve the problems they face through creative thinking and change of ideas by using practical TRIZ techniques, and contribute to innovative technology development and productivity improvement.

반도체 제조 공정에서 사용되는 제품의 외관 검사 및 포장 단계에서 정전기에 의해 particle이 제품 자체나 운반용 도구 등에 흡착되는 문제가 발생한다. 본 연구는 실용 트리즈 기법을 활용하여 제품에 particle이 흡착되는 문제를 개선할 수 있는 방법론을 제시한다. 제시한 실용 트리즈 기반의 방법론을 적용하여 문제를 정의하고, 제품 대기 시간으로 인해 발생하는 모순을 도출하였다. 도출된 모순 중 물리적 모순을 설정하고 '공간분리'의 개념을 적용하여 '이오나이저 설치' 및 '작업실 Layout 개선'이라는 해결방안을 도출하였다. 실용 트리즈 적용을 통해 도출한 '이오나이저 설치' 및 '작업실 Layout 개선'을 적용하여 실험한 결과, 제품이 대기하는 시간에서 발생되는 particle 흡착 문제를 해결할 수 있음을 확인하였다. 본 연구를 통해, 제조현장에서 근무하는 작업자, 설비 엔지니어, 기술 엔지니어들이 실용 트리즈 기법을 활용하여 창의적 사고, 발상의 전환을 통해 직면한 문제를 효과적으로 해결하고 혁신적인 기술개발 및 생산성 향상에 기여할 수 있을 것이다.

Keywords

Acknowledgement

이 논문은 2022년도 한국기술교육대학교 교수 교육연구 진흥과제 지원에 의하여 연구되었음.

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