반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

6자유도 MEMS 관성센서 정적성능 자동 평가 시스템 구현에 관한 연구

A Study on Implementation of Automatic Evaluation System for Static Performance of 6 DOF MEMS Inertial Sensor

  • 박지원 (한국기술교육대학교 대학원 메카트로닉스공학과) ;
  • 딘 후사무드 (한국기술교육대학교 대학원 메카트로닉스공학과) ;
  • 이병렬 (한국기술교육대학교 메카트로닉스공학부)
  • Ji Won Park (Department of Mechatronics Engineering, Graduate School of Korea University of Technology and Education) ;
  • Hussamud Din (Department of Mechatronics Engineering, Graduate School of Korea University of Technology and Education) ;
  • Byeung Leul Lee (School of Mechatronics Engineering, Korea University of Technology and Education)
  • 투고 : 2023.08.11
  • 심사 : 2023.09.12
  • 발행 : 2023.09.30
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

With the advancement in technology and rapid increase in the demand for microelectromechanical systems (MEMS) based inertial measurement units (IMUs), high-volume production and test system remain a major challenge for the MEMS industry. To compete with the challenging market of Industry 4.0, here we developed an automatic test system to evaluate the performance of the ovenized IMU sensors as well as analyze the data. The automatic test system was developed by interfacing a commercial MEMS IMU (BMI 088) using LabVIEW. The BMI 088 was tested experimentally for long-term bias stability, ON/OFF bias repeatability, and root mean square (rms) noise. Furthermore, the data was analyzed through the developed test system. The results show that the automatic test system has improved the test time and reduced human effort. The developed automatic test system is a significant approach to MEMS research and development (R&D) to increase and improve the mass production of IMUs.

키워드

과제정보

이 논문은 2023년도 한국기술교육대학교 교수 교육연구진흥과제 지원에 의하여 연구되었음. 이 논문은 2023년도 정부(산업통상자원부)의 재원으로 한국산업기술진흥원의 지원을 받아 수행된 연구임(P0008458, 2023년 산업혁신인재성장지원사업).

참고문헌

  1. E. Mounier, "Future of MEMS: A market & technologies perspective," in Yole Development, MEMS Tech Seminar, 2014.
  2. H. Din, F. Iqbal, and B. Lee, "Mode Ordering of Single-Drive Multi-Axis MEMS Gyroscope for Reduced Cross-Axis Sensitivity," Sensors and Actuators A: Physical, p. 113145, 2021.
  3. N. Ahmad, R. A. R. Ghazilla, N. M. Khairi, and V. Kasi, "Reviews on various inertial measurement unit (IMU) sensor applications," International Journal of Signal Processing Systems, vol. 1, pp. 256-262, 2013. https://doi.org/10.12720/ijsps.1.2.256-262
  4. V. Skvortzov, Y. C. Cho, B.-L. Lee, and C. Song, "Development of a gyro test system at Samsung Advanced Institute of Technology," in PLANS 2004. Position Location and Navigation Symposium (IEEE Cat. No. 04CH37556), 2004, pp. 133-142.
  5. C. He, J. Cui, J. Yan, L. Lin, F. Wang, Z. Guo, et al., "Development of automatic test system for micromachined gyroscope based on LabVIEW," Chin. J. Sens. Actuators, vol. 24, pp. 170-174, 2011.
  6. F. Iqbal, H. Din, and B. Lee, "Time Efficient Evaluation of Multi-axis MEMS Gyroscope Using Three-dimensional Test Methodology," Journal of Semiconductor Technology And Science, vol. 19, pp. 600-607, 2019. https://doi.org/10.5573/JSTS.2019.19.6.600
  7. Z. Jichen, X. Wenyi, C. Jianfa, W. Weijian, and W. Lingyun, "Dynamic Parameters Test of Micro-Machined Gyroscope Based on LabVIEW [J]," Computer Measurement & Control, vol. 3, 2013.
  8. N. Instruments. USB-8452 Specifications [Online]. Available: https://www.ni.com/documentation/en/i2c-spi-interface-device/latest/specs-usb8452/specs/
  9. B. Sensortec, "BMI088 6-axis motion tracking for high-performance applicatins," in Data sheet, ed. Germany: Bosch Sensortec GmbH, May 2018.
  10. H. Din, F. Iqbal, J. Park, and B. Lee, "Bias-Repeatability Analysis of Vacuum-Packaged 3-Axis MEMS Gyroscope Using Oven-Controlled System," Sensors, vol. 23, p. 256, 2022.
  11. N. Single-Axis, "IEEE Standard Specification Format Guide and Test Procedure for Linear," 1999.
  12. R. K. Curey, M. E. Ash, L. O. Thielman, and C. H. Barker, "Proposed IEEE inertial systems terminology standard and other inertial sensor standards," in PLANS 2004. Position Location and Navigation Symposium (IEEE Cat. No. 04CH37556), 2004, pp. 83-90.
  13. W. Draft, "Draft Recommended Practice for Inertial Sensor Test Equipment, Instrumentation, Data Acquisition, and Analysis," 2004.
  14. D. Yang, J.-K. Woo, S. Lee, J. Mitchell, A. D. Challoner, and K. Najafi, "A micro oven-control system for inertial sensors," Journal of Microelectromechanical Systems, vol. 26, pp. 507-518, 2017. https://doi.org/10.1109/JMEMS.2017.2692770
  15. R. Fedoryshyn, S. Klos, V. Savytskyi, and S. Kril, "Improvement of pulse-width modulation algorithm for thermal plant control," Energy Engineering and Control Systems, 2 (3), 2017, vol. 3, pp. 63-72, 2017. https://doi.org/10.23939/jeecs2017.02.063
  16. N. Instruments. NI-845x Hardware and Software Manual [Online]. Available: https://www.ni.com/pdf/manuals/371746e.pdf
  17. D. W. Allan, "Statistics of atomic frequency standards," Proceedings of the IEEE, vol. 54, pp. 221-230, 1966. https://doi.org/10.1109/PROC.1966.4634
  18. "IEEE Standard for Sensor Performance Parameter Definitions," IEEE Std 2700-2014, pp. 1-69, 2014.