Acknowledgement
본 연구는 2023년도 중소벤처기업부의 기술개발사업 지원에 의한 연구임(RS-2023-00224896)
References
- Zhang, L., Liu, Y., Liang, D., Kou, P., Wang, Y., Gao, Y., Li, D. and Liu, H ., "Local and Remote Cooperative Control of Hybrid Distribution Transformers Integrating Photovoltaics in Active Distribution Networks", IEEE Transactions on Sustainable Energy, 13(4), pp. 2012~2026. (2022). https://doi.org/10.1109/TSTE.2022.3179120
- Liu, K.-T. and Chen, C.-H., "Formulation of research and development strategy by analysing patent portfolios of key players the semiconductor industry according to patent strength and technical function", World Patent Information, 70, p. 102125. (2022).
- Green, M. A., "Thin-film solar cells: review of materials, technologies and commercial status", Journal of Materials Science: Materials in Electronics, 18(1), pp. 15~19. (2007). https://doi.org/10.1007/s10854-007-9177-9
- Lee, B.-T., Jang, D.-H. and Kim, T.-S., "Effect of carbon addition on the microstructure of Si3N4-Cfiber composites using semiconductor-waste Si sludge", Journal of the European Ceramic Society, 24(8), pp. 2313~2318. (2004). https://doi.org/10.1016/S0955-2219(03)00632-0
- K, J., Jekal, S., Kim, H.-Y., Kim, M. S., Kim, D. H., Kim, C.-G., Chu, Y.-R., Lee, N. and Yoon, C.-M., "Study of the Sludge Formation Mechanism in Advanced Packaging Process and Prevention Method for the Sludge", Journal of Korea Organic Resource Recycling Association, 31(1), pp. 35~45. (2023).
- Jung, W.-G., Back, G.-S., Kim, J.-H., Chang, Y.-C. and Yoo, S.-J., "Preliminary reduction of chromium ore using Si sludge generated in silicon wafer manufacturing process", Journal of Mining and Metallurgy, Section B: Metallurgy, 54(1), pp. 29~37. (2018). https://doi.org/10.2298/JMMB170520054J
- Lin, S. H. and Yang, C. R., "Chemical and physical treatments of chemical mechanical polishing wastewater from semiconductor fabrication", Journal of Hazardous Materials, 108(1-2), pp. 103~109. (2004). https://doi.org/10.1016/j.jhazmat.2004.01.014
- Wang, W., Luo, Y. and Qiao, W., "Possible solutions for sludge dewatering in China", Frontiers of Environmental Science & Engineering in China, 4(1), pp. 102~107. (2010). https://doi.org/10.1007/s11783-010-0001-z
- Liang, Y., Xu, D., Feng, P., Hao, B., Guo, Y. and Wang, S., "Municipal sewage sludge incineration and its air pollution control", Journal of Cleaner Production, 295, p. 126456. (2021).
- Bye, G. and Ceccaroli, B., "Solar grade silicon: Technology status and industrial trends", Solar Energy Materials and Solar Cells, 130, pp. 634~646. (2014). https://doi.org/10.1016/j.solmat.2014.06.019
- Liu, W.-T. and Li, K.-C., "Application of Reutilization Technology to Calcium Fluoride Sludge from Semiconductor Manufacturers", Journal of the Air & Waste Management Association, 61(1), pp. 85~91. (2011). https://doi.org/10.3155/1047-3289.61.1.85
- Lee, T.-C., Lin, K.-L., Su, X.-W. and Lin, K.-K., "Recycling CMP sludge as a resource in concrete", Construction and Building Materials, 30, pp. 243~251. (2012). https://doi.org/10.1016/j.conbuildmat.2011.11.019
- Jang, H. D., Kim, H., Chang, H., Kim, J., Roh, K. M., Choi, J.-H., Cho, B.-G., Park, E., Kim, H., Luo, J. and Huang, J., "Aerosol-Assisted Extraction of Silicon Nanoparticles from Wafer Slicing Waste for Lithium Ion Batteries", Scientific Reports, 5(1), p. 9431. (2015).
- Ryu, J., Kim, W., Yun, J., Lee, K., Lee, J., Yu, H., Kim, J. H., Kim, J. J. and Jang, J., "Fabrication of Uniform Wrinkled Silica Nanoparticles and Thier Application to Abrasives in Chemical Mechanical Planarization", ACS Applied Materials & Interfaces, 10(14), pp. 11843~11851. (2018). https://doi.org/10.1021/acsami.7b15952
- Linec, M. and Music, B., "The Effects of Silica-Based Fillers on the Properties of Epoxy Molding Compounds", Materials, 12(11), p. 1811. (2019).
- Heo, G.-Y. and Park, S.-J., "Effect of coupling agents on thermal, flow, and adhesion properties of epoxy/silica compounds for capillay underfill applications", Powder Technology, 12(11), p. 1811. (2019).
- Kim, D. H., Kim, J., Jekal, S., Kim, M. J., Kim, H.-Y., Kim, M., Kim, S.-C., Park, S.-Y. and Yoon, C.-M., "Synthesis of Sludge Waste-derived Semiconductor Grade Uniform Colloidal Silica Nanoparticles and Their CMP Application", Journal of Korea Organic Resource Recycling Association, 30(3), pp. 5~12. (2022).
- Bondareva, J. V., Aslyamov, T. F., Kvashnin, A. G., Dyakonov, P. V., Kuzminova, Y. O., Mankelevich, Y. A., Voronina, E. N., Dagesyan, S. A., Egorov, A. V., Khmelnitsky, R. A., Tarkhov, M. A., Suetin, N. V., Akhatov, I. S. and Evlashin, S. A., "Environmentally Friendly Method of Silicon Recycling: Synthesis of Silica Nanoparticles in an Aqueous Solution", ACS Sustainable Chemistry & Engineering, 8(37), pp. 14006~14012. (2020). https://doi.org/10.1021/acssuschemeng.0c03783
- Yoon, C.-M., Ryu, J., Yun, J., Kim, Y. K. and Jang, J., "Synthesis of Hierarchical Silica/Titania Hollow Nanoparticles and Their Enhanced Electroresponsive Activity", ACS Applied Materials & Interfaces, 10(7), pp. 6570~6579. (2018). https://doi.org/10.1021/acsami.7b18895
- Yoon, C.-M., Jang, Y., Lee, S. and Jang, J., "Dual electric and magnetic responsivity of smart fluids containing multilayered magnetite-embedded core/shell silica/titania nanoparticles having an outermost silica shell", Journal of Materials Chemistry C, 6(38), pp. 10241~10249. (2018). https://doi.org/10.1039/C8TC03677B
- Yoon, C.-M., Jang, Y., Noh, J., Kim, J., Lee, K. and Jang, J., "Enhanced Electrorheological Performance of Mixed Silica Nanomaterial Geometry", ACS Applied Materials & Interfaces, 9(41), pp. 36358~36367. (2017). https://doi.org/10.1021/acsami.7b08298
- Kim, H.-Y., Jekal, S., Lee, N., Sa, M., Kim, D. H., Kim, M. S., Kim, J. and Yoon, C.-M., "Synthesis of Uniform Silica Nanoparticles using Tap, Industrial, and Stream water and Their Application to Electro-responsive Smart Fluid System", Journal of Korea Organic Resource Recycling Association, 31(1), pp. 47~56. (2023).
- Kreyling, W. G., Semmler-Behnke, M. and Chaudhry, Q., "A complementary definition of nanomaterial", Nano Today, 5(3), pp. 165~168. (2010). https://doi.org/10.1016/j.nantod.2010.03.004
- Mazzola, L., "Commercializing nanotechnology", Nature Biotechnology, 21, pp. 1137~1143. (2003). https://doi.org/10.1038/nbt1003-1137
- Khan, I., Saeed, K. and Khan, I., "Nanoparticles: Properties, applications and toxicities", Arabian Journal of Chemistry, 12(7), pp. 908~931. (2019). https://doi.org/10.1016/j.arabjc.2017.05.011
- Baig, N., Kammakakam, I. and Falath, W., "Nanomaterials: a review of synthesis methods, properties, recent progress, and challenges", Materials Advances, 2(6), pp. 1821~1871. (2021). https://doi.org/10.1039/D0MA00807A
- Mazari, S. A., Ali, E., Abro, R., Khan, F. S. A., Ahmed, I., Ahmed, M., Nizamuddin, S., Siddiqui, T. H., Hossain, N., Mubarak, N. M. and Shah, A., "Nanomaterials: Applications, waste-handling, environmental toxicities, and future challenges - A review", Journal of Environmental Chemical Engineering, 9(2), p. 105028. (2021).
- H an, X. X., Ji, W., Zhao, B. and Ozaki, Y., "Semiconductor-enhanced Raman scattering: active nanomaterials and applications", Nanoscale, 9(15), pp. 4847~4861. (2017). https://doi.org/10.1039/C6NR08693D
- Pomerantseva, E., Bonaccorso, F., Cui, Y. and Gogotsi, Y., "Energy storage: The future enabled by nanomaterials", Science, 366(6468), pp. 969. (2019).
- Kumar, N. and Ray, S. S., "Synthesis and Functionalization of Nanomaterials", Processing of Polymer-based Nanocomposites, 277, pp. 15~55. (2018). https://doi.org/10.1007/978-3-319-97779-9_2
- Fang, J., Zhou, Z., Xiao, M., Lou, Z., Wei, Z. and Shen, G., "Recent advances in low-dimensional semiconductor nanomaterials and their applications in high-performance photodetectors", InfoMat, 2(2), pp. 235~433. (2020). https://doi.org/10.1002/inf2.12067
- Zhang, L., Wang, J. and Tian, Y., "Electrochemical in-vivo sensors using nanomaterials made from carbon species, noble metals, or semiconductors", Microchimica Acta, 181, pp. 1471~1484. (2014). https://doi.org/10.1007/s00604-014-1203-z
- Chen, J.-F., Wang, Y.-H., Guo, F., Wang, X.-M. and Zheng, C., "Synthesis of Nanoparticles with Novel Technology: High-Gravity Reactive Precipitation", Industrial & Engineering Chemistry Research, 39(4), pp. 948~954. (2000). https://doi.org/10.1021/ie990549a
- Chen, S.-L., Dong, P., Yang, G.-H. and Yang, J.-J., "Kinetics of Formation of Monodisperse Colloidal Silica Particles through the Hydrolysis and Condensation of Tetraethylorthosilicate", Industrial & Engineering Chemistry Research, 35(12), pp. 4487~4493. (1996). https://doi.org/10.1021/ie9602217
- Lee, S., Yoon, C.-M., Hong, J.-Y. and Jang, J., "Enhanced electrorheological performance of a graphene oxide-wrapped silica rod with a high aspect ratio", Journal of Materials Chemistry C, 2(30), pp. 6010~6016. (2014). https://doi.org/10.1039/C4TC00635F
- Vrancken, K. C., Coster, L. D., Voort, P. V. D., Grobet, P. J. and Vansant, E. F., "The Role of Silanols in the Modification of Silica Gel with Aminosilanes", Journal of Colloid and Interface Science, 170(1), pp. 71~77. (1995). https://doi.org/10.1006/jcis.1995.1073
- Ahmadian-Fard-Fini, S., Salavati-Niasari, M. and Safardoust-Hojaghan, H., "Hydrothermal green synthesis and photocatalytic activity of magnetic CoFe2O4-carbon quantum dots nanocomposite by turmeric precursor", Journal of Materials Science: Materials in Electronics, 28(21), pp. 16502~16214. (2017).
- Kaya, H., Ngo, D., Gin, S. and Kim, S. H., "Spectral changes in Si-O-Si stretching band of porous glass network upon ingress of water", Journal of Non-Crystalline Solids, 527, p. 119722. (2020).
- Tyagi, P. K., Sharma, S., Tyagi, S., Mishra, A. and Gola, D., "Toxicity assessment of silica nanoparticles, and their conjugates with curcumin on Drosophila melanogaster", Environmental Nanotechnology, Monitoring & Management, 17, p. 100616. (2022).
- Jacobs, J. H., Deering, C. E., Sui, R., Cann, A. P., Lesage, K. L. and Marriott, R. A., "The role of carbon dioxide and water in the degradation of zeolite 4A, zeolite 13X and silica gels", New Journal of Chemistry, 47, pp. 5249~5261. (2023). https://doi.org/10.1039/D3NJ00093A
- Ndayishimiye, A., Largeteau, A., Mornet, S., Duttine, M., Dourges, M.-A., Denux, D., Verdier, M., Goune, M., Beauvoir, T. H. D., Elissalde, C. and Goglio, G., "Hydrothermal Sintering for Densifigation of Silica. Evidence for the Role of Water", Journal of the European Ceramic Society, 38(4), pp. 1860~1870. (2018). https://doi.org/10.1016/j.jeurceramsoc.2017.10.011
- Blin, J. L. and Carteret, C., "Investigation of the Silanols Groups of Mesostructured Silica Prepared Using a Fluorinated Surfactant: Influence of the Hydrothermal Temperature", The Journal of Physical Chemistry C, 111(39), pp. 14380~14388. (2007).