Journal of Power Electronics

The Korean Institute of Power Electronics (전력전자학회)
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2-kW plasma power supply design with small frequency fluctuations

  • Received : 2022.12.08
  • Accepted : 2023.03.21
  • Published : 2023.05.20
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Abstract

This paper proposes a 2-kW plasma power supply with a small frequency fluctuation. In existing plasma power supplies, when the input voltage is fixed, the frequency fluctuation is large according to the load impedance and output voltage of the plasma discharger, which constitutes a problem. The proposed plasma power supply addresses this problem by generating an output voltage with a small frequency fuctuation according to the load impedance and output voltage change by applying a variable input voltage and a compensation capacitor. The proposed circuit has a two-stage structure comprising a single-phase power factor correction (PFC) boost converter and a high-frequency inverter with a parallel resonant circuit. Accordingly, a prototype plasma power supply with an output voltage of 3-5 kVpk and 2-kW was designed, and its validity was verifed using experimental results obtained from the proposed circuit.

Keywords

Acknowledgement

This work was supported by a Korea Technology and Information Promotion Agency for SMEs(TIPA) grant funded by the Ministry of SMEs and Startups (G21S297024702)

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