한국결정성장학회지 (Journal of the Korean Crystal Growth and Crystal Technology)

  • 제33권3호
  • /
  • Pages.91-96
  • /
  • 2023
  • /
  • 1225-1429(pISSN)
  • /
  • 2234-5078(eISSN)
한국결정성장학회 (The Korea Association of Crystal Growth)
권호 표지
DOI QR코드

DOI QR Code

실리콘 단결정 잉곳 제조용 석영유리 도가니 내 기포 품질평가를 위한 가속시험

Accelerated testing for evaluating bubble quality within quartz glass crucibles used for manufacturing silicon single crystal ingots

  • 이규빈 (한서대학교 신소재공학과) ;
  • 강승민 (한서대학교 국제디자인융합전문대학원) ;
  • 최재호 (한양대학교 신소재공학과) ;
  • 변영민 (한양대학교 신소재공학과) ;
  • 김형준 (한국세라믹기술원 엔지니어링소재센터)
  • Gyu Bin Lee (Division of Materials Science and Engineering, Hanseo University) ;
  • Seung Min Kang (Department of Convergence of Design and Engineering, Hanseo University) ;
  • Jae Ho Choi (Division of Materials Science and Engineering, Hanyang University) ;
  • Young Min Byeon (Division of Materials Science and Engineering, Hanyang University) ;
  • Hyeong-Jun Kim (Engineering Material Center, Korea Institute of Ceramic Engineering & Technology)
  • 투고 : 2023.06.13
  • 심사 : 2023.06.22
  • 발행 : 2023.06.30
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

석영유리 도가니(QC)의 사용 중 기포 품질을 검증하기 위하여 적절한 가속 시험 방법을 제안하였다. 실제 Czochralski(Cz) 공정에서 얻어진 폐기물 도가니의 기포 상태를 분석하고 QC 시험편을 이용하여 온도, 압력, 시간을 변화시켜 최적의 열처리 조건을 제시하였다. Cz 공정에서 생성되는 유사한 기포 크기와 밀도로 제어하기 위해서는 1450℃, 0.4 Torr 및 40시간의 열처리 조건이 적절하였다. 특히 Cz 공정에서 적용하는 압력인 10~20 Torr보다 상대적으로 낮은 압력인 0.4 Torr를 선택함으로써 기포 형성 가속시험의 시간을 단축시킬 수 있었다. 열처리 온도를 1550℃ 높일 경우, Ostwald ripening 현상으로 인하여 기포가 커지고 밀도가 급격히 낮아지며, 결정화 발생으로 적절한 가속시험 조건은 아닌 것으로 판단하였다.

To verify the quality of bubbles during the use of quartz glass crucibles (QC), an appropriate accelerated testing method was proposed. The bubble state of discarded waste crucibles obtained from actual Czochralski (Cz) processes was analyzed, and optimal heat treatment conditions were suggested by varying temperature, pressure, and time using the QC test piece. By subjecting the samples to heat treatment at 1450℃, 0.4 Torr, and 40 hours, it was possible to control the bubble size and density to a similar level as those generated in the actual Cz process. In particular, by selecting a relatively lower pressure of 0.4 Torr compared to the typical range of 10~20 Torr applied in the Cz process, the time required for accelerated bubble formation testing could be reduced. However, it was determined that increasing the heat treatment temperature to 1550℃ led to the phenomenon of Ostwald ripening, resulting in larger bubbles and a rapid decrease in density. Therefore, it was concluded that it was not a suitable condition for the desired b ake test.

키워드

과제정보

본 연구는 2023년도 산업통상자원부 소재부품기술개발사업(과제고유번호 1415169523, 6N급 초고순도 합성 쿼츠 과립 분말 제조기술 개발)의 지원을 받아 수행된 연구입니다.

참고문헌

  1. W. Zulehner, "Czochralski growth of silicon", J. Cryst. Growth 65 (1983) 189.
  2. R. Bruning and F. Habegger, "Method of making quartz glass crucibles, and apparatus carrying out the method", US Patent US44116680A, 22.11.1983.
  3. R.E. Chaney and C.J. Varker, "The erosion of materials in molten silicon", J. Electrochem. Soc. 123 (1976) 846.
  4. Y.S. Jung, J.H. Choi, K.W. Min, Y.M. Byun, W.B. Im, S. Noh and H.-J. Kim, "A study on the brownish ring of quartz glass crucible for silicon single crystal ingot", J. Korean Cryst. Growth Cryst. Technol. 32 (2022) 115.
  5. W. von Ammon, J. Friedrich and G. Muller, "Czochralski growth of silicon crystals", in: T. Nishinaga, P. Rudolph, T. Kuech Eds., Hand. Cryst. Growth, 2nd ed., Elsevier (2014) 45.
  6. O. Paulsen, S. Rorvik, A.M.F. Muggerud and M. Juel, "Bubble distribution in fused quartz crucibles studied by micro X-Ray computational tomography. comparing 2D and 3D analysis", J, Cryst. Growth 520 (2019) 96.
  7. A. Staudt, Verfahren fur die Herstellung eines Quarzglastiegels mit transparenterInnenbeschichtung aus synthetisch erzeugtem Quarzglas. Germany PatentDE102010045934B4, 5.4. 2012.
  8. S.S. Zumdahl and S.A. Zumdahl, "Chemistry", 7th ed, Houghton, New York (2011) 482.
  9. P.W. Voorhees, "The theory of Ostwald ripening", J. Stat. Physics 38 (1985) 231.
  10. A.D. Le Claire, "Diffusion in solids, liquids, gases", Academic Press Inc., Publishers, New York (1952) 558.
  11. W. Bernhard, "Regulation of surfactant-associated phospholipid synthesis and secretion", Fetal and Neonatal Physiology, 5 ed., vol 1 (2017) 813.
  12. J.W, Lim, T.H. Kim and K.B. Park, "Study on the devitrification of quartz crucible for the preparation of single crystal silicon ingot", J. Korean Cryst. Growth Cryst. Technol. 28 (2018) 99.
  13. A. Hirsch and M. Trempa, "Investigation of gas bubble growth in fused silica crucibles for silicon Czochralski crystal growth", J. Cryst. Growth 553 (2020) 125.