Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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A Study on the Al2O3 Thin Film According to ALD Argon Purge Flow Rate and Application to the Encapsulation of OLED

ALD 아르곤 퍼지유량에 따른 Al2O3박막 분석 및 유기발광 다이오드 봉지막 적용에 관한 연구

  • DongWoon Lee (Department of Electronics Engineering, Gachon University) ;
  • Ki Rak Kim (Department of Electronics Engineering, Gachon University) ;
  • Eou Sik Cho (Department of Electronics Engineering, Gachon University) ;
  • Yong-min Jeon (Department of Biomedical Engineering, Gachon University) ;
  • Sang Jik Kwon (Department of Electronics Engineering, Gachon University)
  • 이동운 (가천대학교 전자공학과) ;
  • 김기락 (가천대학교 전자공학과) ;
  • 조의식 (가천대학교 전자공학과) ;
  • 전용민 (가천대학교 의공학과) ;
  • 권상직 (가천대학교 전자공학과)
  • Received : 2023.02.17
  • Accepted : 2023.03.20
  • Published : 2023.03.31
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Abstract

Organic light-emitting diode(OLED) is very thin organic films which are hundreds of nanometers. Unlike bottom-emission OLED(BEOLED), top-emission OLED(TEOLED) emits light out the front, opaque moisture absorbents or metal foils can't be used to prevent moisture and oxygen. And it is difficult to have flexible characteristics with glass encapsulation, so thin film encapsulation which can compensate for those two disadvantages is mainly used. In this study, Al2O3 thin films by atomic layer deposition(ALD) were examined by changing the argon gas purge flow rate and we applied this Al2O3 thin films to the encapsulation of TEOLED. Ag / ITO / N,N'-Di-[(1-naphthyl)-N,N'-diphenyl]-1,1'-biphenyl-4,4'-diamine / tris-(8-hydroxyquinoline) aluminum/ LiF / Mg:Ag (1:9) were used to fabricate OLED device. The characteristics such as brightness, current density, and power efficiency are compared. And it was confirmed that with a thickness of 40 nm Al2O3 thin film encapsulation process did not affect OLED properties. And it was enough to maintain a proper OLED operation for about 9 hours.

Keywords

Acknowledgement

본 성과는 2022년도 정부(산업통상자원부)의 재원으로 한국산업기술진흥원(KIAT)의 지원을 받아 수행된 연구임 (No. P001245, 2022년 산업혁신인재성장지원사업). 본 성과는 또한 정부(과학기술정보통신부)의 재원으로 한국연구재단의 지원을 받아 수행된 연구임(No. NRF-2022R1A2C1003076).

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