Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Airborne Fine Particle Measurement Data Analysis and Statistical Significance Analysis

공기중 미세입자 측정 데이터 분석 및 통계 유의차 분석

  • Sung Jun An (Department of Artificial Intelligence Engineering, Cheju Halla University) ;
  • Moon Suk Hwan (Department of Artificial Intelligence Engineering, Cheju Halla University)
  • 안성준 (제주한라대학교 인공지능공학과) ;
  • 문석환 (제주한라대학교 인공지능공학과)
  • Received : 2023.01.25
  • Accepted : 2023.03.20
  • Published : 2023.03.31
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Abstract

Most of the production process is performed in a cleanroom in the case of facilities that produce semiconductor chips or display panels. Therefore, environmental management of cleanrooms is very important for product yield and quality control. Among them, airborne particles are a representative management item enough to be the standard for the actual cleanroom rating, and it is a part of the Fab or Facility monitoring system, and the sequential particle monitoring system is mainly used. However, this method has a problem in that measurement efficiency decreases as the length of the sampling tube increases. In addition, a statistically significant test of deterioration in efficiency has rarely been performed. Therefore, in this study, the statistically significant test between the number of particles measured by InSitu and the number of particles measured for each sampling tube ends(Remote). Through this, the efficiency degradation problem of the sequential particle monitoring system was confirmed by a statistical method.

Keywords

References

  1. International Organization for Standardization (ISO). ISO 14644-1, Cleanrooms and associate controlled environments-Part 1: classification of air cleanliness. 1999.
  2. Kwang-Min Choi, Ji-Eun Lee, Kwi-Young Cho, Kwan-Sick Kim, Soo-Hun Cho, "Clean Room Structure, Air Conditioning and Contamination Control Systems in the Semiconductor Fabrication Process" J. of The Korean Society of Occupational and Environmental Hygiene, Vol.25(2), pp. 202-210, 2015. https://doi.org/10.15269/JKSOEH.2015.25.2.202
  3. Sung Jun An, "Advancement of Sequential Particle Monitoring System" J. of the Semiconductor & Display Technology, Vol.21(1), pp. 17-21, 2022.
  4. Seung-Ki Chae, " Particle Measurement and Analysis in Semiconductor Manufacturing Process " J. of The Korean Society of Mechanical Engineers, Vol.39(5), pp. 398-404, 1995.
  5. PMS, "Airborne Particle Measurements: 100 LPM vs. 1 CFM Particle Counters in a Semiconductor Cleanroom Environment", PMS Application Note 211 (2020).
  6. PMS, "Particle Transportation", PMS Application Note 201 (2018).
  7. COX, David R. Statistical significance tests. British journal of clinical pharmacology, 1982, 14.3: 325.
  8. Park Hyungyu, Park Seonghyun, Seo Janghoo, "Independence Test for Particle Intervals in Lagrangian based CFD Using Statistical Analysis" J. of Korean Institute of Architectural Sustainable Environment and Building Systems, Vol.16(2), pp. 173-183, 2022.
  9. Lee Sang Hyuk, Lee Jong Won, Park Ki Soo, Lee Su-Hyung, Park Hee Mun, "Statistical Analysis of Characteristics of Fine Particulate Matter Concentrations Considering Weather Conditions" International journal of highway engineering, Vol.22(5), pp. 37-45, 2020. https://doi.org/10.7855/IJHE.2020.22.5.037
  10. Kyoungjjn Kim, Joong-Youn Park, "Dispersion Characteristics of Nonspherical Fume Micro-Particles in Laser Line Machining in Terms of Particle Sphericity" J. of the Semiconductor & Display Technology, Vol.21(2), pp. 1-6, 2022.