Acknowledgement
본 논문은 2020년도 정부(산업통상자원부)의 재원으로 한국에너지기술평가원의 (과제번호: 20213030010240, 대면적 결정질/박막 실리콘 이종접합(HJT) 태양광 모듈 핵심소재.장비.공정 기술 개발)과 2022년도 한국에너지기술평가원의 (과제번호: 20224000000360, 태양전지 모듈 중견기업 특화 인력양성) 과제연구비에 의해 지원되었음.
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