Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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ALD-based Functional Bragg Reflector Structure to Block Harmful Ultraviolet Rays that Affect the Reliability of Organic Devices

유기소자의 신뢰성에 영향을 주는 유해 자외선을 차단하기 위한 ALD기반 기능성 브래그반사경 구조

  • Hyeun Woo Kim (Dept. of Physics & Nano science, Sunmoon University) ;
  • Hyeong Jun Lee (Dept. of Physics & Nano science, Sunmoon University) ;
  • Seungmi Jang (Dept. of Physics & Nano science, Sunmoon University) ;
  • Hyeongjun Yun (Dept. of Physics & Nano science, Sunmoon University) ;
  • Dokyun Lee (Dept. of Physics & Nano science, Sunmoon University) ;
  • Yongmin Lee (Dept. of Physics & Nano science, Sunmoon University) ;
  • Sangyeon Park (Dept. of Physics & Nano science, Sunmoon University) ;
  • Jihoon Jung (Dept. of Physics & Nano science, Sunmoon University) ;
  • Seokjun Lim (Dept. of Physics & Nano science, Sunmoon University) ;
  • Jeong Hyun Kwon (Dept. of Display and Semiconductor Engineering, Sunmoon University)
  • 김현우 (선문대학교 나노과학과) ;
  • 이형준 (선문대학교 나노과학과) ;
  • 장승미 (선문대학교 나노과학과) ;
  • 윤형준 (선문대학교 나노과학과) ;
  • 이도균 (선문대학교 나노과학과) ;
  • 이용민 (선문대학교 나노과학과) ;
  • 박상연 (선문대학교 나노과학과) ;
  • 정지훈 (선문대학교 나노과학과) ;
  • 임석준 (선문대학교 나노과학과) ;
  • 권정현 (선문대학교 디스플레이반도체공학과)
  • Received : 2023.11.27
  • Accepted : 2023.12.18
  • Published : 2023.12.31
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Abstract

To solve the reliability problem of organic devices that are often used outdoors, multifunctional gas barriers that block reactive gases such as moisture and oxygen and reflect harmful light such as ultraviolet rays are needed. In this study, ALD nanolaminate-based optically functional n-DBR was developed to overcome the poor gas permeability of polymer substrates and protect organic devices from harmful light. n-DBR not only achieved a WVTR of 8.76 × 10-6 g·m-2·day-1, but also showed a visible light transmittance of 94.3% and an ultraviolet ray blocking ability of 2.67%. In particular, n-DBR based on a nanolaminate structure maintained its permeability characteristics even in a high temperature and high humidity environment despite being used as a layer of Al2O3. This functional barrier Structure can not only be used as a functional encapsulation barrier for the reliability of organic devices, but can also be used as a tinting film for vehicles.

Keywords

Acknowledgement

본 논문은 2023년도 교육부의 재원으로 한국연구재단 의 지원을 받아 수행된 지자체-대학 협력기반 지역혁신 사업(2021RIS-004) 및 2023년도 과학기술정보통신부의 재원으로 한국연구재단의 지원을 받아 수행된 결과(No. 2022R1F1A1075914)입니다. 추가로, 이 논문은 산업통상자원부 한국산업기술진흥원(KIAT)과 교육부의 부처협업사업 [반도체전공트랙사업](P0022203)의 지원으로 수행하였습니다.

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