반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

광분광기의 노이즈 감소를 위한 암전류에 대한 실험적 고찰

Experimental Study on Dark Current Noise to Reduce Background Voltage Level of Optical Emission Spectroscopy

  • 육영준 (한국공학대학교 메카트로닉스공학부) ;
  • 이건우 (한국공학대학교 메카트로닉스공학부) ;
  • 최은종 (한국공학대학교 IT 반도체 공학과) ;
  • 김효영 (한국공학대학교 메카트로닉스공학부) ;
  • 김기현 (한국공학대학교 메카트로닉스공학부)
  • Youngjun Yuk (Tech University of Korea, Department of Mechatronics Engineering) ;
  • Keonwoo Lee (Tech University of Korea, Department of Mechatronics Engineering) ;
  • Eunjong Choi (Tech University of Korea, Department of IT Semiconductor Convergence Engineering) ;
  • Hyoyoung Kim (Tech University of Korea, Department of Mechatronics Engineering) ;
  • Kihyun Kim (Tech University of Korea, Department of Mechatronics Engineering)
  • 투고 : 2023.11.27
  • 심사 : 2023.12.18
  • 발행 : 2023.12.31
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초록

As semiconductor devices become highly integrated and process difficulty increases, the need for highly sensitive sensors that can detect micro leaks is increasing. However, the noise contained in the CCD sensor itself acts as an obstacle to detecting fine leaks. In this study, integration time was changed for each condition, the sensor was cooled to 0℃, and the dark voltage level was measured to confirm through experiment the characteristics of the temporal noise included in the CCD sensor, a component of OES (Optical Emission Spectroscopy). When integration time was reduced from 30msec to 10msec, the dark voltage level decreased by about 20.5 % from an average of 151.5mV to 120.5mV. In the case of cooling device, Peltier elements were selected because of their simple structure and small size. During temperature cooling, the target temperature was controlled to within ±0.5℃ through PID control. When cooled from 20℃ to 0℃ using this cooling device, it was confirmed that the dark voltage level decreased by about 7% from an average of 147.0mV to 137.0mV.

키워드

과제정보

이 논문은 산업통산자원부(MOTIE)에서 지원하는 2023년도 전자부품산업 기술개발(1415185203), 산업혁신인재양성사업(P0008458), 차세대지능형반도체기술개발(20023103) 그리고 한국공학대학교 연구년 지원을 받아 연구되었음.

참고문헌

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