Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
권호 표지

Experimental Study on Dark Current Noise to Reduce Background Voltage Level of Optical Emission Spectroscopy

광분광기의 노이즈 감소를 위한 암전류에 대한 실험적 고찰

  • Youngjun Yuk (Tech University of Korea, Department of Mechatronics Engineering) ;
  • Keonwoo Lee (Tech University of Korea, Department of Mechatronics Engineering) ;
  • Eunjong Choi (Tech University of Korea, Department of IT Semiconductor Convergence Engineering) ;
  • Hyoyoung Kim (Tech University of Korea, Department of Mechatronics Engineering) ;
  • Kihyun Kim (Tech University of Korea, Department of Mechatronics Engineering)
  • 육영준 (한국공학대학교 메카트로닉스공학부) ;
  • 이건우 (한국공학대학교 메카트로닉스공학부) ;
  • 최은종 (한국공학대학교 IT 반도체 공학과) ;
  • 김효영 (한국공학대학교 메카트로닉스공학부) ;
  • 김기현 (한국공학대학교 메카트로닉스공학부)
  • Received : 2023.11.27
  • Accepted : 2023.12.18
  • Published : 2023.12.31
Download PDF
⟨ Previous Next ⟩

Abstract

As semiconductor devices become highly integrated and process difficulty increases, the need for highly sensitive sensors that can detect micro leaks is increasing. However, the noise contained in the CCD sensor itself acts as an obstacle to detecting fine leaks. In this study, integration time was changed for each condition, the sensor was cooled to 0℃, and the dark voltage level was measured to confirm through experiment the characteristics of the temporal noise included in the CCD sensor, a component of OES (Optical Emission Spectroscopy). When integration time was reduced from 30msec to 10msec, the dark voltage level decreased by about 20.5 % from an average of 151.5mV to 120.5mV. In the case of cooling device, Peltier elements were selected because of their simple structure and small size. During temperature cooling, the target temperature was controlled to within ±0.5℃ through PID control. When cooled from 20℃ to 0℃ using this cooling device, it was confirmed that the dark voltage level decreased by about 7% from an average of 147.0mV to 137.0mV.

Keywords

Acknowledgement

이 논문은 산업통산자원부(MOTIE)에서 지원하는 2023년도 전자부품산업 기술개발(1415185203), 산업혁신인재양성사업(P0008458), 차세대지능형반도체기술개발(20023103) 그리고 한국공학대학교 연구년 지원을 받아 연구되었음.

References

  1. S.C.Pyun, On monitoring of gas leak in the plasma vacuum process with optical emission spectroscopy, Center for Vacuum Technology, Korea Research Institute of Standards and Science, 2010. 
  2. S.C.Kim, A Semiconductor Etching Process Monitoring System Development using OES Sensor, Journal of The Korea Society of Computer and Information Vol.18, No. 3, March 2013. 
  3. J.J.Cho, Improved Self Plasma-Optical Emission Spectroscopy for In-situ Plasma Process Monitoring : Improved Self Plasma-Optical Emission Spectroscopy for In-situ Plasma Process Monitoring, Journal of the Semiconductor & Display Technology Vol.16, No. 2, March 2017. 
  4. J.Y.Lee, OES based PECVD Process Monitoring Accuracy Improvement by IR Background Signal Subtraction from Emission Signal, Journal of the Semiconductor & Display Technology Vol.18, No. 1, January 2019. 
  5. S.G.Do, Noise analysis and noise reduction circuit for CMOS Image sensor, Hanyang University, 2009. 
  6. Russell S. Brayfield II, Optical Emission Spectroscopy of High Voltage Cold Atmospheric Plasma Generated Using Dielectric Barrier Discharges, Purdue University, 2016. 
  7. D. R. White, The status of Johnson noise thermometry, metrologia, 1996. 
  8. Mikhail Konnik, High-level numerical simulations of noise in CCD and CMOS photosensors: review and tutorial, Faculty of Engineering and Built Environment, University of Newcastle, Australia, 2009. 
  9. Jord Prangsma, The effect of cooling CCD detectors for spectroscopy, Ibsen photonics, 2015. 
  10. Du-Yeol Pang, Temperature Control of the Alumium Plate with Peltier Module by PWM Current Control, Korean Society for Precision Engineering, 2005. 
  11. Dong-Ryul Lee, Investigation of the Optimal Cooling Performance Using Peltier Module and Heat sink, Korea Institute of Science and Technology Information, 2006.