Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Numerical Simulation on Dispersion of Fume Micro-Particles by Particle Suction Flows in Laser Surface Machining

입자 석션유동에 따른 레이저 표면가공의 마이크로 흄 오염입자 산포 특성 해석연구

  • Kyoungjin Kim (Department of Mechanical System Engineering, Kumoh National Institute of Technology)
  • 김경진 (금오공과대학교 기계시스템공학과)
  • Received : 2023.10.17
  • Accepted : 2023.12.12
  • Published : 2023.12.31
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Abstract

In CO2 laser surface machining of plastic films in modern display manufacturing, scattering of fume particles could be a major source of well-recognized film surface contamination. This computational fluid dynamics research investigates the suction air flow patterns over a film surface as well as the dispersion of micron-sized fume particles with low-Reynolds number particle drag model. The numerical results show the recirculatory flow patterns near laser machining point on film surface and also over the surface of vertical suction slot, which may hinder the efficient removal of fume particles from film surface. The dispersion characteristics of fume particles with various particle size have been tested systematically under different levels of suction flow intensity. It is found that suction removal efficiency of fume particles heavily depends on the particle size in highly nonlinear manners and a higher degree of suction does not always results in more efficient particle removal.

Keywords

Acknowledgement

이 연구는 금오공과대학교 대학 학술연구비로 지원되었습니다(2021년도).

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