Journal of Industrial Technology (산업기술연구)

Kangwon National University, Institute of Industrial Technology (강원대학교 산업기술연구소)
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Optimization for robot operations in cluster tools for concurrent manufacturing of multiple wafer types

복수 타입의 웨이퍼 혼류생산을 위한 클러스터 장비 로봇 운영 최적화

  • Tae-Sun Yu (Division of Systems Management and Engineering, Pukyong National University) ;
  • Jun-Ho Lee (School of Business, Chungnam National University) ;
  • Sung-Gil Ko (Division of Energy Resource and Industrial Engineering, Kangwon National University)
  • Received : 2023.12.18
  • Accepted : 2023.12.28
  • Published : 2023.12.31
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Abstract

Cluster tools are extensively employed in various wafer fabrication processes within the semiconductor manufacturing industry, including photo lithography, etching, and chemical vapor deposition. Contemporary fabrication facilities encounter customer orders with technical specifications that are similar yet slightly varied. Consequently, modern fabrications concurrently manufacture two or three different wafer types using a cluster tool to maximize chamber utilization and streamline the flow of wafer lots between different process stages. In this review, we introduce two methods of concurrent processing of multiple wafer types: 1) concurrent processing of multiple wafer types with different job flows, 2) concurrent processing of multiple wafer types with identical job flows. We describe relevant research trends and achievements and discuss future research directions.

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Acknowledgement

이 논문은 국립부경대학교 자율창의학술연구비(2022년)에 의하여 연구되었음.

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