Journal of the Korean Crystal Growth and Crystal Technology (한국결정성장학회지)

The Korea Association of Crystal Growth (한국결정성장학회)
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4H-SiC bulk single crystal growth using recycled powder

재생 분말을 활용한 4H-SiC 벌크 단결정 성장

  • Yeo, Im Gyu (Industrial Materials Research Group, Research Institute of Industrial Science & Technology (RIST)) ;
  • Lee, Jae Yoon (Industrial Materials Research Group, Research Institute of Industrial Science & Technology (RIST)) ;
  • Chun, Myong Chuel (Industrial Materials Research Group, Research Institute of Industrial Science & Technology (RIST))
  • 여임규 (산업소재연구그룹, (재)포항산업과학연구원) ;
  • 이재윤 (산업소재연구그룹, (재)포항산업과학연구원) ;
  • 전명철 (산업소재연구그룹, (재)포항산업과학연구원)
  • Received : 2022.08.16
  • Accepted : 2022.09.26
  • Published : 2022.10.31
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Abstract

This study is to verify the feasibility of SiC single crystal growth using recycled SiC powder. The fundamental physical properties such as particle size, shape, composition and impurities of the recycled powder were analyzed, and the sublimation behavior occurring inside the reactor were predicted using the basic data. As a result of comprehensive judgment, the physical properties of the recycled powder were suitable for single crystal growth, and single crystal growth experiments were conducted using this. 100 mm 4H-SiC single crystal ingot with a height of 25 mm was grown without polytype inclusion. In the case of micro-pipe density was 0.02 ea/cm2 and resistivity characteristics was 0.015~0.020 ohm·cm2, commercial level quality was obtained, but additional analysis related to dislocation density and stacking faults is required for device application.

본 연구는 재생된 SiC 분말을 이용하여 단결정 성장 가능성을 검증하는 것을 목적으로 한다. 재활용 분말의 입도, 형상, 조성, 불순물 등의 기초적인 물성을 분석하고, 이를 활용하여 반응기 내부에서 일어날 수 있는 승화 거동을 예측하였다. 종합적인 판단 결과, 재생 분말의 물성은 단결정 성장에 적합 하였고, 이를 이용하여 단결정 성장 실험을 진행하였다. 높이 25 mm, 직경 100 mm 4H-SiC 단결정 잉곳을 다른 다형혼입 없이 성장 시켰다. 동공 결함 밀도는 0.02 ea/cm2, 비저항은 0.015~0.020 ohm·cm2 측정되어 상용 수준의 품질을 얻었으나, 실제 소자 적용을 위해서는 전위 결함, 적층 결함과 관련된 추가 분석이 필요하다고 판단된다.

Keywords

Acknowledgement

본 연구는 2021년도 산업통상자원부 청정생산기반산업공생 기술개발사업(R&D) - 클린팩토리 기술개발(20014405)의 지원을 받아 수행된 연구입니다.

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