Journal of IKEEE (전기전자학회논문지)

Institute of Korean Electrical and Electronics Engineers (한국전기전자학회)
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Analysis of post-annealing effect and electrical properties of Li3PO4/SiC

Li3PO4/SiC의 후열처리에 의한 영향 및 전기적 특성 분석

  • Received : 2022.06.07
  • Accepted : 2022.06.20
  • Published : 2022.06.30
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Abstract

We analyzed the effect of post-annealing on lithium phosphate (Li3PO4) solid-state thin-film. Li3PO4 thin films were deposited by radio frequency (RF) sputtering, with subsequent annealing of the films at 200-400 ℃. SEM imaging of the sample surfaces showed no significant difference in morphology between the annealed and non-annealed samples. XRD analysis indicated that the samples consist of an amorphous-like structure. Post-annealing changes in binding energy were confirmed by XPS analysis, while the leakage current density at -6 V was measured to be about 7.15 times lower in a device that had been annealed at 400 ℃ vs a non-annealed device. It was confirmed that the leakage current decreased with increasing post-annealing temperature.

우리는 인산리튬(Li3PO4) 고체 상태 박막에 대한 후열처리의 영향을 분석했다. Li3PO4 박막은 무선 주파수(RF) 스퍼터링에 의해 증착되었으며, 이후 200-400 ℃에서 박막을 열처리 했다. 샘플 표면의 SEM 이미지는 열처리된 샘플가 열처리되지 않은 샘플 사이의 형태에 유의미한 차이를 나타내지 않았다. XRD 분석은 샘플이 비정질과 유사한 구조로 구성되어 있음을 나타낸다. 열처리 후 결합 에너지의 변화는 XPS 분석에 의해 확인하였으며, -6 V에서의 누설 전류 밀도는 400 ℃에서 열처리된 소자가 열처리되지 않은 소자에 비해 약 7.15배 더 낮은 것으로 측정되었다. 후열처리 온도가 증가함에 따라 누설전류가 감소함을 확인하였다.

Keywords

Acknowledgement

This work was supported by the Korea Institute of Energy Technology Evaluation and Planning(KETEP) and the Ministry of Trade, Industry & Energy(MOTIE) of the Republic of Korea(20214000000700) and Korea Institute for Advancement of Technology(KIAT) grant funded by the Korea Government(MOTIE) (P0012451), and the excellent researcher support project of Kwangwoon University in 2022.

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