반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

입자 구형도에 따른 레이저 선가공의 비구형 흄 마이크로 입자 산포 특성 연구

Dispersion Characteristics of Nonspherical Fume Micro-Particles in Laser Line Machining in Terms of Particle Sphericity

  • 김경진 (금오공과대학교 기계시스템공학과) ;
  • 박중윤 (금오공과대학교 기계시스템공학과)
  • Kim, Kyoungjin (Department of Mechanical System Engineering, Kumoh National Institute of Technology) ;
  • Park, Joong-Youn (Department of Mechanical System Engineering, Kumoh National Institute of Technology)
  • 투고 : 2022.03.17
  • 심사 : 2022.06.21
  • 발행 : 2022.06.30
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초록

This computational investigation of micro-sized particle dispersion concerns the fume particle contamination over target surface in high-precision laser line machining process of semiconductor and display device materials. Employing the random sampling based on probabilistic fume particle generation distributions, the effects of sphericity for nonspherical fume particles are analyzed for the fume particle dispersion and contamination near the laser machining line. The drag coefficient correlation for nonspherical particles in a low Reynolds number regime is selected and utilized for particle trajectory simulations after drag model validation. When compared to the corresponding results by the assumption of spherical fume particles, the sphericity of nonspherical fume particles show much less dispersion and contamination characteristics and it also significantly affects the particle removal rate in a suction air flow patterns.

키워드

과제정보

본 연구는 금오공과대학교 학술연구비에 의하여 지원된 논문이다(과제번호: 2019-104-012).

참고문헌

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