반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

Aerosol Deposition Nozzle Design for Uniform Flow Rate: Divergence Angle and Nozzle Length

  • Kim, Jae Young (Department of Industrial and Management Engineering, Myongji University) ;
  • Kim, Young Jin (Department of Electronics Engineering, Myongji University) ;
  • Jeon, Jeong Eun (Department of Industrial and Management Engineering, Myongji University) ;
  • Jeon, Jun Woo (Department of Electronics Engineering, Myongji University) ;
  • Choi, Beom Soo (Department of Electronics Engineering, Myongji University) ;
  • Choi, Jeong Won (Department of Industrial and Management Engineering, Myongji University) ;
  • Hong, Sang Jeen (Department of Electronics Engineering, Myongji University)
  • 투고 : 2022.05.24
  • 심사 : 2022.06.22
  • 발행 : 2022.06.30
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초록

Plasma density in semiconductor fabrication equipment becomes higher to achieve the improved the throughput of the process, but the increase of surface corrosion of the ceramic coated chamber wall has been observed by the increased plasma density. Plasma chamber wall coating with aerosol deposition prefer to be firm and uniform to prevent the potential creation of particle inside the chamber from the deformation of the coating materials, and the aerosol discharge nozzle is a good control factor for the deposited coating condition. In this paper, we investigated the design of the nozzle of the aerosol deposition to form a high-quality coating film. Computational fluid dynamics (CFD) study was employed to minimize boundary layer effect and shock wave. The degree of expansion, and design of simulation approach was applied to found out the relationship between the divergence angle and nozzle length as the key parameter for the nozzle design. We found that the trade-off tendency between divergence angle and nozzle length through simulation and quantitative analysis, and present the direction of nozzle design that can improve the uniformity of chamber wall coating.

키워드

과제정보

This work was supported by Korea Institute for Advancement of Technology (KIAT) grant funded by the Korea Government (MOTIE). (P0008458, The Competency Development Program for Industry Specialist.)

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