센서학회지 (Journal of Sensor Science and Technology)

  • 제31권2호
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  • Pages.90-95
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  • 2022
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  • 1225-5475(pISSN)
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  • 2093-7563(eISSN)
한국센서학회 (The Korean Sensors Society)
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ITO Nanoparticle Film을 이용한 센서의 전극 구조가 동작 성능에 미치는 영향에 대한 연구

Study on the Effect of the Electrode Structure of an ITO Nanoparticle Film Sensor On Operating Performance

  • 안상수 (한국해양대학교 전자소재공학과) ;
  • 노재하 (한국해양대학교 전자소재공학과) ;
  • 이창한 (한국해양대학교 전자소재공학과) ;
  • 이상태 (한국해양대학교 해양플랜트운영학과) ;
  • 서동민 (선박해양플랜트연구소 해양안전환경연구본부) ;
  • 이문진 (선박해양플랜트연구소 해양안전환경연구본부) ;
  • 장지호 (한국해양대학교 전자소재공학과)
  • An, Sangsu (Major of Electronic Materials Engineering, Korea Maritime and Oceean University) ;
  • Noh, Jaeha (Major of Electronic Materials Engineering, Korea Maritime and Oceean University) ;
  • Lee, Changhan (Major of Electronic Materials Engineering, Korea Maritime and Oceean University) ;
  • Lee, Sangtae (Department of offshore plant management, Korea Maritime and Oceean University) ;
  • Seo, Dongmin (Maritime safey and Environmental Research Division, KRISO) ;
  • Lee, Moonjin (Maritime safey and Environmental Research Division, KRISO) ;
  • Chang, Jiho (Major of Electronic Materials Engineering, Korea Maritime and Oceean University)
  • 투고 : 2022.02.04
  • 심사 : 2022.03.07
  • 발행 : 2022.03.31
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초록

The effect of the structure of an ITO nanoparticle film sensor on its performance was studied. A printed ITO film (P-ITO film) was fabricated on a flexible polyethylene terephthalate (PET) substrate, and the contact resistance of the electrode and sensor response change were clarified according to the detection position. The contact resistance between Ag and P-ITO was observed to be -204.4 Ω using the transmission line method (TLM), confirming that a very good ohmic contact is possible. In addition, we confirmed that the contact position of the analyte had a significant influence on the response of the sensor. Based on these results, the performance of the four types of sensors was compared. Consequently, we observed that 1) optimizing the resistance of the printed film, 2) optimizing the electrode structure and analyte input position, and 3) optimizing the electrode area are very important for fabricating a metal oxide nanoparticle (MONP) sensor with optimal performance.

키워드

과제정보

본 연구는 해양수산부 지원 'HNS 사고 관리 기술 개발' 과제의 일환으로 수행되었습니다

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