센서학회지 (Journal of Sensor Science and Technology)

  • 제31권2호
  • /
  • Pages.107-114
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  • 2022
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  • 1225-5475(pISSN)
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  • 2093-7563(eISSN)
한국센서학회 (The Korean Sensors Society)
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DOI QR Code

SOI 슬롯 광 도파로 기반 단일 및 삽입-분기 채널 링-공진형 바이오·케미컬 집적광학 센서의 제원에 대한 감도 해석

Sensitivity Analysis for Specifications of Silicon-on-Insulator (SOI) Slot Optical Waveguide-based Single and Add-drop Channel Ring-resonant Biochemical Integrated Optical Sensors

  • 장재식 (홍익대학교 대학원 전자전산공학과) ;
  • 정홍식 (홍익대학교 대학원 전자전산공학과)
  • Jang, Jaesik (Dept. of Electronic & Computer Engineering, Graduate School, Hongik Unversity) ;
  • Jung, Hongsik (Dept. of Electronic & Computer Engineering, Graduate School, Hongik Unversity)
  • 투고 : 2022.03.13
  • 심사 : 2022.03.18
  • 발행 : 2022.03.31
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초록

The effects of ring radius and coupling spacing on the free spectral range (FSR), full width at half maximum (FWHM), quality factor, and sensitivity of single-channel and add-drop channel slot ring resonators were systematically investigated using FIMMPROP and PICWAVE numerical software. The single-channel ring resonator exhibited better characteristics, namely, a wider FSR and narrower FWHM compared with the add-drop structure; thus, it was evaluated to be more suitable for biochemical sensors. The FSR, FWHM, quality factor, and sensitivity for a single channel ring resonator with a radius of 59.4 ㎛ and coupling gap of 0.5 ㎛ were 2.4 nm, 0.087 nm, 17677, and 550 [nm/RIU], respectively.

키워드

과제정보

이 논문은 한국연구재단 이공학개인기초연구 (2018-R1D1A1B07049908) 연구비 지원으로 수행되었습니다.

참고문헌

  1. A. Elmanova, P. An, V. Kovalyuk, A. Golikov, I. Elmanov, and G. Goltsman, "Study of silicon nitride O-ring resonator for gas-sensing applications", J. Phys.: Conf. ser., pp. 1-6, Saint Petersburgs, Russian, 2020.
  2. B. Kumari, A. Barh, R. K. Varshney, and B.P. Pal, "Silicon-on-nitride slot waveguide: A promising platform as mid-IR trace gas sensor", Sens. Actuators. B. Chem., Vol. 236, pp. 759-764, 2016. https://doi.org/10.1016/j.snb.2016.06.060
  3. C. A. Barrios, "Optical slot-waveguide Based Biochemica l Sensors", sensors, Vol. 9, No. 6, pp. 4751-4765, 2009. https://doi.org/10.3390/s90604751
  4. P. Sanati, S. S. Hashemi, M. Bahadoran, A. A. Babadi, and E. Akbari, "Detection of Escherichia coli K12 in Water Using Slot Waveguide in Cascaded Ring Resonator", Silicon, Vol. 14, No. 3, pp. 851-857, 2021.
  5. Y. Zou, W. Chakravarty, C. J. Chung, X. Xu, and R. T. Chen, "Mid-infrared silicon photonic waveguides and devices[Invited]", Photonics. Res., Vol. 6, No. 4, pp. 254-276, 2018. https://doi.org/10.1364/PRJ.6.000254
  6. Y. Ma, B. Dong, and C. Lee, "Progress of infrared guided-wave nanophotonic sensors and devices", Nano. Converg., Vol. 7, No. 12, 2020.
  7. C. A. Barrios, "Analysis and modeling of a silicon nitride slot-waveguide microring resonator biochemical sensor", Proc. SPIE., Vol. 7356, Prague, Czech Republic, 2009.
  8. A. Yalcin, K. C. Popat, J. C. Aldridge, T. A. Desai, J. Hryniewicz, N. Chbouki, B. E. Little, O. King, V. Van, S. Chu, D. Gill, M. A. Washburn, M. S. unlu, and B. B. Goldberg, "Optical sensing of biomolecules using microring resonators", IEEE. J. Sel. Top. Quantum. Electron., Vol. 12, No. 1, pp. 148-155, 2006. https://doi.org/10.1109/JSTQE.2005.863003
  9. Q. Liu, X. Tu, K. W. Kim, J. S. Kee, Y. Shin, K. Han, Y. J. Yoon, G. Q. Lo, and M. K. Park, "Highly sensitive Mach-Zehnder interferometer biosensor based on silicon nitride slot waveguied", Sens. Actuators. B. Chem., Vol. 188, pp. 681-688, 2013. https://doi.org/10.1016/j.snb.2013.07.053
  10. K. E. Zinoviev, A. B. Gonzalez-Guerrero, C. Dominguez, and L. M. Lechuga, "Integrated Bimodal Waveguide Interferometric Biosensor for Label-Free Analysis", J. Light-wave Technol., Vol. 29, No. 13, pp. 1926-1930, 2011. https://doi.org/10.1109/JLT.2011.2150734
  11. T. Mazingue, R. K. Kribich, P. Etienne, and Y. Moreau. "Simulations of refractive index variation in a multimode interference coupler: Application to gas sensing", Opt. Commun., Vol. 278, No. 2, pp. 312-316, 2007. https://doi.org/10.1016/j.optcom.2007.06.036
  12. C. A. Barrios, B. Sanchez, K. B. Gylfason, A. Griol, H. Sohlstrom, M. Holgado, and R. Casquel, "Demonstration of slot-waveguide structures on silicon nitride/silicon oxide platform", opt. Express., Vol. 15, No. 11, pp. 6846-6856, 2007. https://doi.org/10.1364/OE.15.006846
  13. X. Wang, S. Grist, J. Flueckiger, N. A. F. Jaeger, and L. Chrostowski, "Silicon photonics slot waveguide Bragg gratings and resonators", opt. Express., Vol. 21, No. 16, pp. 19029-19039, 2013. https://doi.org/10.1364/OE.21.019029
  14. F. Prieto, A. Llobera, D. nez, C. nguez, A. Calle, and L. M. Lechuga, "Design and Analysis of Silicon Antiresonant Reflecting Optical Waveguide for Evanscent Field Sensor", J. Lightwave. Technol., Vol. 18, No. 7, pp. 966-972, 2000. https://doi.org/10.1109/50.850742
  15. V. R. Almeida, Q. Xu, C. A. Barrios, and M. Lipson, "Guiding and confining light in void nanostructure", Opt. Lett., Vol. 29, No. 11, pp. 1209-1211, 2004. https://doi.org/10.1364/OL.29.001209
  16. K. Y. You, Emerging Waveguide Technology, IntechOpen, London, pp. 187-207, 2018.
  17. O. S. Ahmed, M. A. Swilam, M. H. Bakr, and X. Li, "Efficient Design Optimized of Ring Resonator-Based Optical Filters", J. Lightwave. Technol., Vol. 29, No. 18, pp. 2812-2817, 2011. https://doi.org/10.1109/JLT.2011.2162818
  18. B. Liu, A. Shakouri, and J. E. Bowers, "Passive microringresonator-coupled lasers", Appl. Phys. Lett., Vol. 79, No. 22, pp. 3561-3563, 2001. https://doi.org/10.1063/1.1420585
  19. S. Matsuo and T. Segawa, "Microring-Resonator-Based Widely Tunable Lasers", IEEE. J. Sel. Top. Quantum. Electron., Vol. 15, No. 3, pp. 545-554, 2009. https://doi.org/10.1109/JSTQE.2009.2014248
  20. H. Tazawa and W.H. Steier, "Analysis of ring resonator-based traveling-wave modulators", IEEE. Photonics. Technol. Lett., Vol. 18, No. 1, pp. 211-213, 2006. https://doi.org/10.1109/LPT.2005.861630
  21. I. Kiyay, A. Aydinli, and N. Dagli, "High-Q silicon-in-insulator optical rib waveguide racetrack resonators", Opt. Express., Vol. 13, No. 6, pp. 1900-1905, 2005. https://doi.org/10.1364/OPEX.13.001900
  22. K. D. Vos, I. Bartolozzi, E. Schacht, P. Beinstman, and R. Baets, "Silicon-om-Insulator microring resonator for sensitive and label-free biosensing", Opt. Express., Vol. 15, No. 12, pp. 7610-7615, 2007. https://doi.org/10.1364/OE.15.007610
  23. V. Mere, H. Muthuganesan, Y. Kar, C. V. Kruijsdijk, and S. K. Selvaraja, "On-Chip Chemical Sensing Using Slot-Waveguide-Based Ring Resonator", IEEE. Sens. J., Vol. 20, No. 11, pp. 5970-5975, 2020. https://doi.org/10.1109/jsen.2020.2974502
  24. D. G. Rabus, Integrated Ring Resonators The compendium., Springer, Heidelberg, pp.3-11, 2007.
  25. R. D. Mansoor, H. Sasse, and A. P. Duffy, "Analysis of Optical Ring Resonator Add/Drop Filters", IWCS., pp. 471-475, North Carolina, USA, 2013.
  26. H. S. Jung, "Optimization of vertical SOI slot optical wave-guide with confinement factor and sensitivity for integerated-optical biochemical sensors", J. Sens. Sci. Technol., Vol. 30, No. 3, pp. 131-138, 2021. https://doi.org/10.46670/JSST.2021.30.3.131