Current Photovoltaic Research

Korea Photovoltaic Society (한국태양광발전학회)
권호 표지
DOI QR코드

DOI QR Code

Characterisitics of RF/DC Sputter Grown-ITO/Ag/ITO Thin Films for Transparent Conducting Electrode

RF/DC 스퍼티 성장한 ITO/Ag/ITO 투명전극 박막의 특성 연구

  • Lee, Youngjae (Department of Energy Convergence Engineering, Cheongju University) ;
  • Kim, Jeha (Department of Energy Convergence Engineering, Cheongju University)
  • 이영재 (에너지융합학과, 청주대학교) ;
  • 김제하 (에너지융합학과, 청주대학교)
  • Received : 2022.02.11
  • Accepted : 2022.03.08
  • Published : 2022.03.31
Download PDF
⟨ Previous Next ⟩

Abstract

We investigated the optical and electrical characteristics of ITO/Ag/ITO (IAI) 3-layer thin films prepared by using RF/DC sputtering. To measure the thickness of all thin film samples, we used scanning electron microscopy. As a function of Ag thickness we characterized the optical transmittance and sheet resistance of the IAI samples by using UV-Visible spectroscopy and Hall measurement system, respectively. While the thickness of both ITO thin films in the 3-layered IAI samples were fixed at 50 nm, we varied Ag layer thickness in the range of 0 nm to 11 nm. The optical transmittance and sheet resistance of the 3-layered IAI thin films were found to vary strongly with the thickness of Ag film in the ITO (50 nm)/Ag(t0)/ITO (50 nm) thin film. For the best transparent conducting oxide (TCO) electrode, we obtained a 3-layered ITO (50 nm)/Ag (t0 = 8.5 nm)/ITO (50 nm) that showed an avrage optical transmittance, AVT = 90.12% in the visible light region of 380 nm to 780 nm and the sheet resistance, R□ = 7.24 Ω/□.

Keywords

References

  1. Lee, G.H, Lee, S.H, Yun, J.H, Kim, D.H, "ITO 투명 전극 소재 기술 동향," Information Display, 11(5), 17 -22 (2010). https://doi.org/10.1080/15980316.2010.9652112
  2. J.U. Seok, "투명전도성 산화물반도체 소재 기술 동향," Ceramist, 20(4), 23-29 (2017).
  3. W.S. Liu, W.T. Hsieh, S.Y. Chen, C.S. Huang, "Improvement of CIGS solar cells with high performance transparent conducting Ti-doped GaZnO thin films," Solar Energy, 174, 83-96 (2018). https://doi.org/10.1016/j.solener.2018.08.050
  4. Q. Wei, Z. Yang, D. Yang, W. Zi, X. Ren, Y. Liu, X. Liu, J. Feng, S. Liu, "The effect of transparent conductive oxide on the performance CH3NH3PbI3 perovskite solar cell without electron/hole selective layers," Solar Energy, 135, 654-661 (2016). https://doi.org/10.1016/j.solener.2016.06.044
  5. N. Biswas, P. Ghosh, S. Sarkar, D. Moitra, P.K. Biswas, S. Jana, A.K. Mukhopadhyay, "Nanomechanical properties of dip coated indium tin oxide films on glass," Thin Solid Films, 579, 21-29 (2015). https://doi.org/10.1016/j.tsf.2015.02.030
  6. C. Yang, S. Lee, T. Lin, S. Chen, "Electrical and optical properties of indium tin oxide films prepared on plastic substrates by radio frequency magnetron sputtering," Thin Solid Films, 516, 1984-1991 (2008). https://doi.org/10.1016/j.tsf.2007.05.093
  7. Jeffrey M. Gaskell, David W. Sheel, "Deposition of indium tin oxide by atmospheric pressure chemical vapour deposition," Thin Solid Films, 520, 4110- 4113 (2012). https://doi.org/10.1016/j.tsf.2011.04.191
  8. C. Guillen, J. Herrero, "TCO/metal/TCO structures for energy and flexible electronics," Thin Solid Films. 520. 1-17 (2011). https://doi.org/10.1016/j.tsf.2011.06.091
  9. M. Bender, W. Seelig, C. Daube, H. Frankenberger, B. Ocker, J. Stollenwerk, "Dependence of film composition and thicknesses on optical and electrical properties of ITO-metal-ITO multilayers," Thin Solid Films, 326, 67-71 (1998). https://doi.org/10.1016/S0040-6090(98)00520-3
  10. H.B. Kim, D.H. Kim, G.H. Lee, K.H. Kim, "Electrical and Optical Properties of Transparent Conducting Films having GZO/Metal/GZO Hybrid-structure; Effects of Metal Laye r(Ag, Cu, Al, Zn)," Korean Institute of Surface Engineering, 43. 148-153 (2010). https://doi.org/10.5695/JKISE.2010.43.3.148
  11. E. Z. Luo, S. Heun, M. Kennedy, J. Wollschlager, M. Henzler, "Surface roughness and conductivity of thin Ag films," Phys. Rev. B, 49, 4858 (1994). https://doi.org/10.1103/physrevb.49.4858
  12. Jung Y.H., Lee E.S., Munir B., Wibowo R.A., Kim K.H., "Structure and Properties of Sputtered Indium Tin Oxide Thin Film," 38, 150-155 (2005).