Acknowledgement
본 논문은 정부의 재원으로 한국연구재단의 지원을 받아 수행되었음(No. 2022-0104).
References
- Lee, Y. H., Choi, J. E., and Hong, S. J., "Semi-Supervised Learning for Fault Detection and Classification of Plasma Etch Equipment," Journal of the Semiconductor & Display Technology, Vol. 19, pp. 121-125, 2020.
- Sim, H. S., "Implementation and Effectiveness of Smart Equipment Engineering System," Journal of the Semiconductor & Display Technology, Vol. 16, pp. 121-126, 2017.
- Lee, J. Y., Yoon, J. S., and Kim, B. H., "A Big Data Analytics Platform for Smart Factories in Small and Medium-Sized Manufacturing Enterprises: An Empirical Case Study of a Die Casting Factory," International Journal of Precision Engineering and Manufacturing, Vol. 18, pp. 1353-1361, 2017. https://doi.org/10.1007/s12541-017-0161-x
- Usami, Yasutsugu., Kawata, Isao., Yamamoto, Hideyuki., Mori, Hiroyoshi., Taniguchi, Motoya., "e-Manufacturing System for Next-generation Semiconductor Production," Hitachi Review, Vol. 51, pp. 84-89, 2002.
- MESA International., "MES Harmonizatio in a Multi-Site, Multi-Country, and Multi-Cultural Environment: Case Study of a Plant to Enterprise Solution," MESA International white Paper, 2008.
- Choi, C. H., and Kim, J. S., "The Effects of the Manufacturing Execution System(MES) Introduction Factors on Management Performance of Small and Medium Business," Journal of Product Research, Vol. 35, pp. 77-84, 2017. https://doi.org/10.36345/kacst.2017.35.4.008
- Jeong, Y. S., "Linking Algorithm between IoT Devices for smart factory environment of SMEs," The Journal of cases on Information Technology," Vol. 8, pp. 233-238, 2018.
- Ko, D., and Park, J., "A Study on the Visualization of Facility Data Using Manufacturing Data Collection Standard," The Institute of Internet, Broadcasting and Communication, Vol. 18, pp. 159-166, 2018.
- Montgomery, D. C., Peck, E. A. and Vining, G.G. "Introduction to Linear Regression Analysis". 4th Edition, Wiley, 2007.
- Hawkins, D. M., "Multivariate Quality Control Based on Regression-Adjusted Variables," Technometrics, Vol. 34, pp. 61-75, 1991.
- Weisberg, S., "Applied Linear Regression(2nd ed.)," New York: John Wiley, 1985.
- Cook, R. D.. "Detection of influential observations in lineachr regression." Technometrics, Vol. 19, pp. 15-18, 1977. https://doi.org/10.2307/1268249
- Hastie, T., Tibshirani, R., and Friedman, J., "The Elements of Statistical Learning," Springer, New York, pp. 214-217, 2001.