반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

EUV 세정에서 정전기 제어를 위한 전해이온수 거동의 분자궤도 이해

Understanding Behaviors of Electrolyzed Water in Terms of Its Molecular Orbitals for Controlling Electrostatic Phenomenon in EUV Cleaning

  • 투고 : 2022.09.16
  • 심사 : 2022.12.12
  • 발행 : 2022.12.31
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초록

The electrostatic phenomenon seriously issued in extreme ultraviolet semiconductor cleaning was studied in junction with molecular dynamic aspect. It was understood that two lone pairs of electrons in water molecule were subtly different each other in molecular orbital symmetry, existed as two states of large energy difference, and became basis for water clustering through hydron bonds. It was deduced that when hydrogen bond formed by lone pair of higher energy state was broken, two types of [H2O]+ and [H2O]- ions would be instantaneously generated, or that lone pair of higher energy state experiencing reactions such as friction with Teflon surface could cause electrostatic generation. It was specifically observed that, in case of electrolyzed cathode water, negative electrostatic charges by electrons were overlapped with negative oxidation reduction potentials without mutual reaction. Therefore, it seemed that negative electrostatic development could be minimized in cathode water by mutual repulsion of electrons and [OH]- ions, which would be providing excellences on extreme ultraviolet cleaning and electrostatic control as well.

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