Understanding Behaviors of Electrolyzed Water in Terms of Its Molecular Orbitals for Controlling Electrostatic Phenomenon in EUV Cleaning

EUV 세정에서 정전기 제어를 위한 전해이온수 거동의 분자궤도 이해

  • Received : 2022.09.16
  • Accepted : 2022.12.12
  • Published : 2022.12.31

Abstract

The electrostatic phenomenon seriously issued in extreme ultraviolet semiconductor cleaning was studied in junction with molecular dynamic aspect. It was understood that two lone pairs of electrons in water molecule were subtly different each other in molecular orbital symmetry, existed as two states of large energy difference, and became basis for water clustering through hydron bonds. It was deduced that when hydrogen bond formed by lone pair of higher energy state was broken, two types of [H2O]+ and [H2O]- ions would be instantaneously generated, or that lone pair of higher energy state experiencing reactions such as friction with Teflon surface could cause electrostatic generation. It was specifically observed that, in case of electrolyzed cathode water, negative electrostatic charges by electrons were overlapped with negative oxidation reduction potentials without mutual reaction. Therefore, it seemed that negative electrostatic development could be minimized in cathode water by mutual repulsion of electrons and [OH]- ions, which would be providing excellences on extreme ultraviolet cleaning and electrostatic control as well.

Keywords

References

  1. T. J. Knapen, Analyzing and optimally controlling the Kelvin water dropper, Master thesis, Electrical engineering, mathematics and computer science, U. Twente, The Netherlands(2015).
  2. James E. Vision and J. J. Liou, Electrostatic discharge in semiconductor devices: protection techniques, Proc. IEEE, Vol. 88, No. 12, pp. 1878-1900, Dec.(2000) https://doi.org/10.1109/5.899057
  3. Hyung-won Kim, Youn-won Jung, In-sik Choi, Byung-sun Choi, Donghyeon Choi, and Kun-kul Ryoo, A Study on Electrostatic Discharging in Ultrapure and Electrolyzed waters using Kelvin's Thunderstorm Effect, J. Semiconductor & Display Technology, Vol.21, No.1, March(2022).
  4. Wikipedia, LCMO, 2022.
  5. Kai Landskron, 3.2: The symmetry adapted linear combination of atomic orbitals method, Wikipedia, Aug. 2021.
  6. Molecular Orbitals for Water.png, Wikimedia Commons, 2021.
  7. C. Fang, W.-F. Li, R. S. Koster, J. Klimes, A. van Blaaderena and M. A. van Huisa, The accurate calculation of the band gap of liquid water by means of GW corrections applied to plane-wave density functional theory molecular dynamics simulations, Phys. Chem. Chem. Phys., Vol. 17, pp. 365-375(2015). https://doi.org/10.1039/c4cp04202f
  8. Alexander Shimkevich, Electrochemical View of the Band Gap of Liquid Water for Any Solution, World Journal of Condensed Matter Physics, Vol. 4, pp. 243-249(2014). https://doi.org/10.4236/wjcmp.2014.44027
  9. Kathryn Haas, Construct SALCs and the molecular orbital diagram for H2O, 6.2.3: H2O-Chemistry Libre Texts, Aug. (2020).
  10. David J. Willock, Molecular Symmetry, John Wiley and sons Ltd., 2009.
  11. C. Huang, K. T. Wikfeldt, Y. T. Tokushima, D. Nordlund, Y. Harada, U. Bergmann, M. Niebuhr, T. M. Weiss, Y. Horikawa, M. Leetmaa, M. P. Ljungberg, O. Takahashi, A. Lenz, L. Ojamae, A. P. Lyubartsev, S. Shin, L. G. M. Pettersson, and Nilsson, The inhomogeneous structure of water at ambient conditions, The proceedings of the national academy of science(PNAS), Vol. 106, No. 36, pp. 15214-15218(2009). https://doi.org/10.1073/pnas.0904743106
  12. Stephan Kratz, Joel Torres-Alacan, Janus Urbanek, Jorg Lindner and Peter Vohringer, Geminate recombination of hydrated electrons in liquid-to-supercritical water studied by ultrafast time-resolved spectroscopy, Phys. Chem. Chem. Phys., Vol. 12, pp. 12169-12176 (2010). https://doi.org/10.1039/c0cp00762e
  13. Chemical Bonding of Water, Wikipedia, 2022.
  14. K. Ryoo, Group Theory for Materials Engineering, Hong-Reung Science Pub., Seoul, Korea(2008).
  15. Alex P. Gaiduk, Marco Govoni, Robert Seidel, Jonathan H. Skone, Bernd Winter, and Giulia Galli, Photoelectron Spectra of Aqueous Solutions from First Principles, J. American Chemical Society, 138, pp. 6912-6915(2016). https://doi.org/10.1021/jacs.6b00225
  16. Mohan Chen, Hsin-Yu Ko, Remsing C. Remsing, Marcos F. Calegari Andrade, Biswajit Santra, Zhaoru Sun, Annabella Selloni, Roberto Car, Michael L. Klein, John P. Perdew, and Xifan Wu, Ab initio theory and modeling of water, Proc. National Academy of Sciences, Vol.114, No.41, pp. 10846-10851Oct.2017). https://doi.org/10.1073/pnas.1712499114
  17. Lixin Zheng, Mohan Chen, Zhaoru Sun, Hsin-Yu Ko, Biswajit Santra, Pratikkumar Dhuvad, and Xifan Wu, Structural, Electronic, and Dynamical Properties of Liquid Water by ab initio Molecular Dynamics based on SCAN Functional within the Canonical Ensemble, J. Chem. Phys. Vol. 148, No. 16, pp. 164505(2018). https://doi.org/10.1063/1.5023611
  18. Kunkul Ryoo, Younwon Jung, Insik Choi, Jaeyong Lee, and Byungsun Choi, Evolutional Wet Cleaning in the Extreme Ultraviolet Era, ECS J. Solid State Science and Technology, Vol.8, (6), pp. 1-4(2019).
  19. C. G. Malmberg and A. A. Maryott, Dielectric Constant of Water from 0° to 100℃, J. Res. The National Bureau of Standards, Vo. 56, No. 1, pp. 1-8(Jan. 1956). https://doi.org/10.6028/jres.056.001
  20. C. F. Gallo and W. L. Lama, Classical Electrostatic Description of the Work Function and ionization Energy of Insulators, IEEE Trans. Industry Applications, Vol. 1A-12, No. 1, pp. 7-11(Jan. 1976).
  21. Work Function, Wikipedia, 2022.
  22. Stephan Thurmer, Sebastian Malerz, Florian Trinter, Uwe Hergenhahn, Chin Lee Daniel M. Neumark, Gerard Meijer, Bernd Winter, and Iain Wilkinson, Accurate vertical ionization energy and work function determinations of liquid water and aqueous solutions, Chem. Sci. Vol. 12, pp. 10558-10582(2021). https://doi.org/10.1039/D1SC01908B
  23. Anthony C. Bevilacqua, Ultrapure water-The Standard for Resistivity Measurements of Ultrapure Water, 1998 Semiconductor Pure Water and Chemicals Conference, pp. 1-25(March 1998).
  24. Lone Pair, Wikipedia, 2022.
  25. P. Cabral do Couto, R. C. Guedes, and B. J. Costa Cabral, The Density of States and Band Gap of Liquid Water by Sequential Monte Carlo/Quantum Mechanics Calculation, Braz. J. Phys., Vol.34, No.1, pp. 42-47(Mar. 2004). https://doi.org/10.1590/S0103-97332004000100007
  26. Chen Wang, Gerd Duscher, and Stephen J. Paddison, Electron Energy Loss Spectroscopy of Polytetrafluoroethylene : Experiment and First Principles Calculations, Microscopy, Vol. 63, No. 1, pp. 73-83, 2014. https://doi.org/10.1093/jmicro/dft046