Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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A study on the Precision Pattern Measurement Based on Gradient Transition Vector

그라디언트 변이 벡터 기반 패턴 측정에 관한 연구

  • Kim, Gyung Bum (Aeronautical & Mechanical Design Engineering, Korea National University of Transportation)
  • 김경범 (한국교통대학교 기계자동차항공공학부)
  • Received : 2021.08.23
  • Accepted : 2021.09.16
  • Published : 2021.09.30
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Abstract

The adjustment of lens magnification can make the degree of precision in pattern measurement be improved, but several problems such as high cost, smaller field of view and stage error accumulation are followed. In this paper, a method for precisely measuring patterns is proposed based on gradient transition vector, in order to solve these problems. The performance of our method is evaluated using pattern images with several directions. Also, it is compared with previous methods based on edge and gray-level moment. It is judged that the proposed method outperforms consistent pattern width results, and so could be applied to automation processes for measurement and inspection of precise and complexed patterns in IT, BT industry products.

Keywords

Acknowledgement

이 논문은 2021년 한국교통대학교 지원을 받아 수행하였음.

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