Journal of the Korea Safety Management & Science (대한안전경영과학회지)

Korea Safety Management & Science (대한안전경영과학회)
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A Study on Machine Failure Improvement Using F-RPN(Failure-RPN): Focusing on the Semiconductor Etching Process

F-RPN(Failure-RPN)을 이용한 장비 고장률 개선 연구: 반도체 식각 공정을 중심으로

  • Lee, Hyung-Geun (Department of Industrial Engineering, INHA University) ;
  • Hong, Yong-Min (Department of Industrial Engineering, INHA University) ;
  • Kang, Sung-Woo (Department of Industrial Engineering, INHA University)
  • 이형근 (인하대학교 산업경영공학과) ;
  • 홍용민 (인하대학교 산업경영공학과) ;
  • 강성우 (인하대학교 산업경영공학과)
  • Received : 2021.08.25
  • Accepted : 2021.09.17
  • Published : 2021.09.30
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Abstract

The purpose of this study is to present a novel indicator for analyzing machine failure based on its idle time and productivity. Existing machine repair plan was limited to machine experts from its manufacturing industries. This study evaluates the repair status of machines and extracts machines that need improvement. In this study, F-RPN was calculated using the etching process data provided by the 2018 PHM Data Challenge. Each S(S: Severity), O(O: Occurence), D(D: Detection) is divided into the idle time of the machine, the number of fault data, and the failure rate, respectively. The repair status of machine is quantified through the F-RPN calculated by multiplying S, O, and D. This study conducts a case study of machine in a semiconductor etching process. The process capability index has the disadvantage of not being able to divide the values outside the range. The performance of this index declines when the manufacturing process is under control, hereby introducing F-RPN to evaluate machine status that are difficult to distinguish by process capability index.

Keywords

Acknowledgement

이 논문은 2021년도 정부(과학기술정보통신부)의 재원으로 한국연구재단-현장맞춤형 이공계 인재양성 지원사업의 지원을 받아 수행된 연구임(No. 64420-27)

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