센서학회지 (Journal of Sensor Science and Technology)

  • 제30권5호
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  • Pages.273-278
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  • 2021
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  • 1225-5475(pISSN)
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  • 2093-7563(eISSN)
한국센서학회 (The Korean Sensors Society)
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Effect of corrugation structure and shape on the mechanical stiffness of the diaphragm

  • Kim, Junsoo (Department of Mechanical Engineering, Pohang University of Science and Technology) ;
  • Moon, Wonkyu (Department of Mechanical Engineering, Pohang University of Science and Technology)
  • 투고 : 2021.09.01
  • 심사 : 2021.09.22
  • 발행 : 2021.09.30
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초록

Here, we studied the change in the mechanical stiffness of a diaphragm according to the corrugation pattern. The diaphragm consists of a silicon oxide and nitride double layer; a corrugation pattern was formed by dry etching, and the diaphragm was released by wet etching. The fabrication of the thin film was verified using focused ion beam and scanning electron microscopy images. The mechanical stiffness of the diaphragm was obtained by measuring the surface vibration using a laser Doppler vibrometer while applying external sound pressure. Flat squares, diaphragms with square corrugations, and circular corrugation patterns were measured and compared. The stiffness of the diaphragm with a corrugation structure was found to be smaller than that without a corrugation structure; in particular, circular corrugation showed a better effect because of the high symmetry. Furthermore, the effect of corrugation was theoretically predicted. The proposed corrugated diaphragm showed comparable flexibility with the state-of-the-art MEMS microphone diaphragm.

키워드

과제정보

This work was supported by the Technology development Program (S2942669) funded by the Ministry of SMEs and Startups (MSS, Korea).

참고문헌

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