Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Development of CTP Selection Methodology of Semiconductor Equipment Line Using AHP and Fuzzy Decision Model

AHP 및 Fuzzy 의사결정 모형을 활용한 반도체 장치라인의 CTP 선정 방법론 개발

  • Jeong, Jaehwan (Graduate School of Consulting Kumoh National Institute of Technology) ;
  • Kim, Jungseop (Graduate School of Consulting Kumoh National Institute of Technology) ;
  • Kim, Yeojin (School of Industrial Engineering Kumoh National Institute of Technology) ;
  • Lee, Jonghwan (School of Industrial Engineering Kumoh National Institute of Technology)
  • 정재환 (금오공과대학교 컨설팅대학원) ;
  • 김정섭 (금오공과대학교 컨설팅대학원) ;
  • 김여진 (금오공과대학교 산업공학과) ;
  • 이종환 (금오공과대학교 산업공학과)
  • Received : 2021.04.20
  • Accepted : 2021.04.29
  • Published : 2021.06.30
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Abstract

Cases and studies on the selection method of CTQ are relatively active, but there are few cases or studies on the selection method of CTP which is important in the device industry. In fact, many companies simply select and manage CTP from the point of contact based on their experience and intuition. The purpose of this study is to present an evaluation model and a mathematical decision model for rational and systematic CTP selection to improve the process quality of semiconductor equipment lines. In the evaluation model, AHP (Analytic Hierarchy Process) analysis technique was applied to show objective and quantitative figures, and Fuzzy decision-making model was used to solve the ambiguity and uncertainty in the decision-making process. Decision Value (DV) was presented. The subjects were 22 process factors managed in the Plating Process that the representative equipment line can do. As a result, the evaluation model proposed in this study can support more efficient and effective decision-making for process quality improvement by more objectively measuring the problem of subjective CTP selection in manufacturing sites.

Keywords

Acknowledgement

This paper was supported by Kumoh National Institute of Technology.

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