Journal of Surface Science and Engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Optimization of tetrahedral amorphous carbon (ta-C) film deposited with filtered cathodic vacuum arc through Taguchi robust design

다구찌 강건 설계를 통한 자장 여과 아크 소스로 증착된 사면체 비정질 탄소막의 최적화

  • Kwak, Seung-Yun (Department of mechanical engineering, Pusan National University (PNU)) ;
  • Jang, Young-Jun (Extreme Environmental Coating Department, Korea Institute of Materials Science (KIMS)) ;
  • Ryu, Hojun (Department of mechanical engineering, Pusan National University (PNU)) ;
  • Kim, Jisoo ;
  • Kim, Jongkuk (Extreme Environmental Coating Department, Korea Institute of Materials Science (KIMS))
  • 곽승윤 (부산대학교 기계공학부) ;
  • 장영준 (한국재료연구원 표면재료연구본부 극한환경코팅 연구실) ;
  • 류호준 (부산대학교 기계공학부) ;
  • 김지수 (경북대학교 정밀기계 공학과) ;
  • 김종국 (한국재료연구원 표면재료연구본부 극한환경코팅 연구실)
  • Received : 2021.01.06
  • Accepted : 2021.03.15
  • Published : 2021.04.30
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Abstract

The properties of tetrahedral amorphous Carbon (ta-C) film can be determined by multiple parameters and comprehensive effects of those parameters during a deposition process with filtered cathodic vacuum arc (FCVA). In this study, Taguchi method was adopted to design the optimized FCVA deposition process of ta-C for improving deposition efficiency and mechanical properties of the deposited ta-C thin film. The influence and contribution of variables, such as arc current, substrate bias voltage, frequency, and duty cycle, on the properties of ta-C were investigated in terms of deposition efficiency and mechanical properties. It was revealed that the deposition rate was linearly increased following the increasing arc current (around 10 nm/min @ 60 A and 17 nm/min @ 100A). The hardness and ID/IG showed a correlation with substrate bias voltage (over 30 GPa @ 50 V and under 30 GPa @ 250 V). The scratch tests were conducted to specify the effect of each parameter on the resistance to plastic deformation of films. The analysis on variances showed that the arc current and substrate bias voltage were the most effective controlling parameters influencing properties of ta-C films. The optimized parameters were extracted for the target applications in various industrial fields.

Keywords

Acknowledgement

이 논문은 정부(과학기술정보통신부)의 재원으로 한국연구재단-미래소재디스커버리사업의 지원을 받아 수행된 연구임(NRF-2020M3D1A2102359).

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