Journal of the Korean Society of Manufacturing Process Engineers (한국기계가공학회지)

The Korean Society of Manufacturing Process Engineers (한국기계가공학회)
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Study of the Geometry and Wettability of Nozzles for Precise Ejection of High Viscous Liquids

고점도 용액 정밀토출을 위한 노즐 직경 및 표면젖음성 특성 연구

  • Lee, Sanghyun (Test & System Package, Samsung Electronics) ;
  • Bae, Jae Hyeon (Division of Mechanical, Automotive, Robot Component Engineering, Dong-Eui University) ;
  • Lee, Sangmin (Division of Mechanical, Automotive, Robot Component Engineering, Dong-Eui University)
  • 이상현 (삼성전자) ;
  • 배재현 (동의대학교 기계자동차로봇부품공학부) ;
  • 이상민 (동의대학교 기계자동차로봇부품공학부)
  • Received : 2021.09.26
  • Accepted : 2021.10.20
  • Published : 2021.12.31
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Abstract

Liquid dispensing systems are extensively used in various industries such as display, semiconductor, and battery manufacturing. Of the many types of dispensers, drop-on-demand piezoelectric jetting systems are widely used in semiconductor industries because of their ability to dispense minute volumes with high precision. However, due to the problems of nozzle clogging and undesirable dispensing behavior in these dispensers, which often result in device failure, the use of highly viscous fluids is limited. Accordingly, we studied the behaviors of droplet formation based on changes in viscosity. The effects of surface energy and the inner diameters of needle-type nozzles were also studied. Results showed that nozzles with lower surface energies reduced the ejection volume of droplets when a smaller nozzle diameter (0.21 mm in this study) was applied. These results indicate that the hydrophobic treatment of nozzle surfaces and the use of smaller nozzle diameters are critical factors enabling the use of highly viscous fluids in precision dispensing applications.

Keywords

Acknowledgement

이 논문은 정부(과학기술정보통신부)의 재원으로 한국연구재단의 지원을 받아 수행된 연구임(No. NRF-2020R1F1A1050735).

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