Acknowledgement
This research was supported by the Basic Science Research Program (2018R1D1A1B07049908) through the National Research Foundation of Korea (KNRF), funded by the Ministry of Science and ICT. This study was conducted during the sabbatical period.
References
- X. Fan, I. White, S. Shopova, H. Zhu, J. Suter and Y. Sun, "Sensitive optical biosensors for unlabeled targets: A review", Analytica Chimica. Acta., Vol. 620, No. 1-2, pp. 8-26, 2008. https://doi.org/10.1016/j.aca.2008.05.022
- R. Chandrasekar, Z. J. Lapin, A. S. Nichols, R. M. Braun and A. W. Fountain, "Photonic integrated circuits for Department of Defense-relevant chemical and biological sensing applications: state-of the-art and future outlooks", OE., Vol. 58, No. 2, pp. 0220901(1)-0220901(11), 2019.
- F. Prieto, B. Sepulveda, A. Calle, A. Llobera, C. Dominguez, A. Abad, A. Montoya, and L. M. Lechuga, "An integrated optical interferometric nanodevice based on silicon technology for biosensor applications", Nanotechnology, Vol. 14, No. 8, pp. 907-912, 2003. https://doi.org/10.1088/0957-4484/14/8/312
- E. Luan, H. Shoman, D. M. Ratner, K. C. Cheung and L. Chrostowski, "Silicon Photonics Biosensors Using Label-Free Detection", Sensors, Vol. 18, No. 10, pp. 3019(1)-3019(4), 2018.
- F. Brosinger, H. Freimuth, M. Lacher, W. Ehrfeld, E. Gedig, A. Katerkamp, F. Spener and K. A. Cammann, "Label-free affinity sensor with compensation of unspecific protein interaction by a highly sensitive integrated optical Mach-Zehnder interferometer on silicon. Sens", Actuators B, Vol. 44, No. 1-3, pp. 350-355, 1997. https://doi.org/10.1016/S0925-4005(97)00226-8
- P. Munoz G. Mico, L. A. Bru, D. Pastor, D. Perez, J. D.Domenech, J. Fernandez, R. Banos, B. Gargallo, R. Alemany, A. M. Sanchez, J. M. Cirera, R. Mas, and C. Dominguez, "Silicon Nitride Photonic Integration Platforms for Visible, Near-Infrared and Mid-Infrared Applications", Sensors, Vol. 17, No. 9, pp. 2088(1)-2088(25), 2017. https://doi.org/10.3390/s17092088
- K. Worhoff, R. G. Heideman, A. Leinse, and M. Hoekman, "TriPlex: a versatile dielectric photonic platform", Adv. Opt. Techn., Vol. 4, No. 2, pp. 189-207, 2017.
- D. J. Blumental, R. Heidman, D. Geuzberoek, A. Leinse and C. Roeloffzen, "Silicon Nitride in Silicon Photonics", Proc. IEEE, Vol. 106, No. 12, pp. 2209-2231, 2018. https://doi.org/10.1109/JPROC.2018.2861576
- K. Zinoviev, A. B. Gonzalez-Guerrero, C. Dominguez and L. M. Lechuga, "Integrated Bimodal Waveguide Interferometric Bio-sensor for Label-Free Analysis", J. Lightwave Technol., Vol. 29, No. 13, pp. 1926-1930, 2011. https://doi.org/10.1109/JLT.2011.2150734
- V. R. Almeida, Q. Xu, C. A. Barrios, and M. Lipson, "Guiding and confining light in void nanostructure", Opt. Lett., Vol. 29, No. 11, pp. 2395-2398, 2004.
- T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, "High-Q optical resonator in silicon-on-insulator-based slot waveguides", Appl. Phys. Lett., Vol. 86, No. 8, pp. 081101(1)-081101(3), 2005. https://doi.org/10.1063/1.1871360
- N. N. Feng, J. Michel and L. C. Kimerling, "Optical Field Concentration in Low-Index Waveguides", IEEE J. Quant. Elec., Vol. 42, No. 9, pp. 883-888, 2006. https://doi.org/10.1109/JQE.2006.880061
- P. Steglich, Silicon-on-Insulator Slot Waveguides: Theory and Applications in Electro-Optics and Optical sensing, Emerging Waveguide Technology, IntechOpen. pp. 187-210, London, United Kingdom, 2018.
- C. Koos, P. Vorreau, T. Vallaitis, P. Dumon, W.Bogaerts, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diederich, W. Freude, and J. LeutholdC, "All-optical high-speed signal processing with silicon-organic hybrid slot waveguides", Nat. Photonics, Vol. 3, No. 4, pp. 216-219, 2009. https://doi.org/10.1038/nphoton.2009.25
- M. Roussey, L. Ahmadi, S. Pelisset, M. Hayrinen, A. Bera, V. Kontturi, J. Laukkanen, I. Vartiainen, S. Honkanen, and M. Kuittinen, "Strip-loaded horizontal slot waveguide", Opt. Lett., Vol. 42, No. 2, pp. 211-214, 2017. https://doi.org/10.1364/OL.42.000211
- H. Zengzhi, Y. Zhang, C. Zeng, D. Li, M. S. Nisar, J. Yu, and J. Xia, "High Confinement Factor Ridge Slot Waveguide for Optical Sensing", IEEE Phot. Technol. Lett., Vol. 27, No. 22, pp. 2395-2398, 2015. https://doi.org/10.1109/LPT.2015.2466595
- R. Singh and V. Priye, "Si3N4-SiO2 Based Curve Slot Waveguide for High Confinement Factor and Low Mode Effective Area along with Biosensing Application", Silicon, pp. 1-9, 2021.
- C. A. Barrios, "Optical Slot-Waveguide Based Biochemical Sensors. Sensors", Vol. 9, No. 6, pp. 4751-4765, 2009. https://doi.org/10.3390/s90604751
- Q. Xu, V. R. Almeida, R. R. Panepucci and M. Lipson, "Experimental demonstration of guiding and confining light in nanometer-size low-refractive-index material", Opt. Lett., Vol. 29, No. 4, pp 1626-1628, 2004. https://doi.org/10.1364/OL.29.001626
- T. Baehr-Johnes, T. Baehr-Jones, M. Hochberg, Guangxi Wang, R. Lawson, Y. Liao, P. A. Sullivan, L. Dalton, A. K.-Y. Jen, and A. Scherer, "Optical modulation and detection in slotted silicon waveguides", Opt. Express, Vol. 13, No. 14, pp. 5216-5226, 2005. https://doi.org/10.1364/OPEX.13.005216
- Q. Liu, X. Tu, K. W. Kim, J. S. Kee, Y. Shin, K. Han, Y. J. Yoon, G. Q. Lo, and M. K. Park, "Highly sensitive Mach-Zehnder interferometer biosensor based on silicon nitride slot waveguide", Sens. Act. B: Chem., Vol. 188, No. 11, pp. 681-683, 2013. https://doi.org/10.1016/j.snb.2013.07.053
- C. A. Barrios and M. Lipson, "Electrically driven silicon resonant light emitting device based on slot-waveguide", Opt. Express, Vol. 13, No. 25, pp. 10092-10101, 2005. https://doi.org/10.1364/OPEX.13.010092
- T. Fusisawa and M. Koshiba, "Polarization-independent optical directional coupler on slot waveguides", Opt. Lett. Vol. 31, No. 1, pp. 56-58, 2006. https://doi.org/10.1364/OL.31.000056
- T. Fusisawa, and M. Koshiba, "All-optical logic gates based on nonlinear slot-waveguide couplers", J. Opt. Soc. Am., Vol. 23, No. 4, pp. 684-691, 2006. https://doi.org/10.1364/JOSAB.23.000684
- T. Fusisawa and M. Koshiba, "Theoretical Investigation of Ultrasmall Polarization-Insensitive 1x2 Multimode Interference Wave-guide Based on Sandwiched Structures", IEEE Photon. Technol. Lett., Vol. 18, No. 11, pp. 1246-1248, 2006. https://doi.org/10.1109/LPT.2006.875058
- P. Mullner and R. Hainberger, "Structural Optimization of Silicon-On-Insulator Slot Waveguides", IEEE Photon. Technol. Lett., Vol. 18, No. 24, pp. 2557-2559, 2006. https://doi.org/10.1109/LPT.2006.886974
- F. Dell'Olio, and V. N. N. Passaro, "Optical sensing by optimized silicon slot waveguides", Opt. Express, Vol. 15, No. 8, pp. 4977-4993, 2007. https://doi.org/10.1364/OE.15.004977
- J. Milvich, D. Kohler, W. Freude and C. Koos, "Surface sensing with integrated optical waveguides: a design guideline", Opt. Express, Vol. 26, No. 16, pp. 19885-19906, 2018. https://doi.org/10.1364/oe.26.019885
- Photon Design Ltd., FIMMWAVE v6.6.0, Oxford, United Kingdom, 2018.
- Photon Design Ltd, FIMMPROP v6.6.0, Oxford, United Kingdom, 2018.
- Y. Liu, M. Kong, and Y. Jiang, "Transverse magnetic modes in planar slot waveguides", J. Opti. Soci. B Am., Vol. 32, No. 10, pp. 2052-2060, 2015. https://doi.org/10.1364/JOSAB.32.002052
- Y. Jiang, M. Kong, C. Liu, Y. Liu and Y. Wang," Transverse electric modes in planar slot waveguides", J. Modern Optics, Vol. 65, No. 1, pp. 111-118, 2018. https://doi.org/10.1080/09500340.2017.1377307
- Y. Fan, S. Peng, and Y. Liu, "Transverse magnetic modes in hybrid nanoslot waveguides", Results in Physics, Vol. 16, No. 3, pp. 103017(1)-103017(9), 2020.
- J. G.Wanguemert-Perez, A. Hadij-ElHouati, A. Sanchez-Postigo, J. Leuermann, D. X. Xu, P. Cheben, A. OrtegaMonux, Robert Halir, and I. Molina-Fernandez, "Subwavelength structures for silicon photonics biosensing", Opt Laser Technol., Vol. 109, No. 1, pp. 437-448, 2019. https://doi.org/10.1016/j.optlastec.2018.07.071
- T. Taniguchi, A. Hirowatari, T. Ikeda, M. Fukuyama, Y. Amemiya, A. Kuroda, and S. Yokoyama, "Detection of antibody-antigen reaction by silicon nitride slot-ring biosensors using protein G", Opt. Commun., Vol. 365, No. 4, pp. 16-23, 2016. https://doi.org/10.1016/j.optcom.2015.11.068