Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Morphological and Electrical Characteristics of nc-ZnO/ZnO Thin Films Fabricated by Spray-pyrolysis for Field-effect Transistor Application

전계효과트랜지스터 기반 반도체 소자 응용을 위한 스프레이 공정을 이용한 nc-ZnO/ZnO 박막 제작 및 특성 분석

  • Cho, Junhee (Department of Electronics Engineering, Sangmyung University)
  • 조준희 (상명대학교 전자공학과)
  • Received : 2021.09.08
  • Accepted : 2021.12.14
  • Published : 2021.12.31
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Abstract

Field-effect transistors based on solution-processed metal oxide semiconductors has attracted huge attention due to their intrinsic characteristics of optical and electrical characteristics with benefits of simple and low-cost process. Especially, spray-pyrolysis has shown excellent device performance which compatible to vacuum-processed Field-effect transistors. However, the high annealing temperature for crystallization of MOS and narrow range of precursors has impeded the progress of the technology. Here, we demonstrated the nc-ZnO/ZnO films performed by spray-pyrolysis with incorporating ZnO nanoparticles into typical ZnO precursor. The films exhibit preserving morphological properties of poly-crystalline ZnO and enhanced electrical characteristics with potential for low-temperature processability. The influence of nanoparticles within the film was also researched for realizing ZnO films providing good quality of performance.

Keywords

References

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