반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

Thermal Evaporation 증발원 개발 및 응용에 관한 연구

A Study on the Development and Application of Thermal Evaporation Source

  • 김관도 (평택대학교 융합소프트웨어학과)
  • Kim, Kwan-Do (Dept. of Convergence Software, PyeongTaek University)
  • 투고 : 2020.08.06
  • 심사 : 2020.08.27
  • 발행 : 2020.09.30
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초록

The thermal evaporation source is used to prepare thin films by physical vapor deposition. Materials of metals, organic materials, were tested and explained for thermal evaporation experiments. The developed effusion cell performance depends on the type of deposition material, the size of the crucible, the performance of the reflector, etc. and the proper conditions were found by producing, comparing and analyzing several sets of effusion cell to quantitatively evaluate the performance of the cell. The effusion cell for thermal evaporation source is used to prepare thin films of Ag, Cu, Mg.

키워드

참고문헌

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