Journal of Integrative Natural Science (통합자연과학논문집)

The Basic Science Institute Chosun University (조선대학교 기초과학연구원)
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Investigation of Physicochemical Properties of Mo Carbide Utilizing Electron Spectroscopy

  • Jeong, Eunkang (Department of Chemistry, Pukyong National University) ;
  • Park, Juyun (Department of Chemistry, Pukyong National University) ;
  • Kang, Yong-Cheol (Department of Chemistry, Pukyong National University)
  • Received : 2020.08.19
  • Accepted : 2020.09.04
  • Published : 2020.09.30
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Abstract

Molybdenum carbide (MoCx) thin films (TFs) were deposited by reactive radio frequency (rf) magnetron co-sputtering in high vacuum chamber. We compared the properties of MoCx thin films as the rf power changed on C target. The result of alpha step measurement showed that the thickness of the MoCx TFs varied from163.3 to 194.86 nm as C power was increased from 160 to 200 W. The crystallinity of MoCx such as b-Mo2C, Mo2C, and diamond like carbon (DLC) structures were observed by XRD. The oxidation states of Mo and C were determined using high resolution XPS spectra of Mo 3d and C 1s were deconvoluted. Molybdenum was consisted of Mo, Mo4+, and Mo6+ species. And C was deconvoluted to C-Mo, C, C-O, and C=O species.

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References

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