참고문헌
-
A. R. Beal and H. P. Hughes, "Kramer-Kronig analysis of the reflectivity spectra of 2H-
$MoS_2$ , 2H-$MoSe_2$ and 2H-$MoTe_2$ ," J. Phys. C: Solid State Phys. 12, 881 (1979). https://doi.org/10.1088/0022-3719/12/5/017 -
Y. Li, A. Chernikov, X. Zhang, A. Rigosi, H. M. Hill, A. M. van der Zande, D. A. Chenet, E.-M. Shih, J. Hone, and T. F. Heinz, "Measurement of the optical dielectric function of monolayer transition-metal dichalcogenides:
$MoS_2$ ,$MoSe_2$ ,$WS_2$ , and$WSe_2$ ," Phys. Rev. B 90, 205422 (2014). https://doi.org/10.1103/PhysRevB.90.205422 -
Y. V. Morozov and M. Kuno, "Optical constants and dynamic conductivities of single layer
$MoS_2$ ,$MoSe_2$ , and$WSe_2$ ," Appl. Phys. Lett. 107, 083103 (2015). https://doi.org/10.1063/1.4929700 -
A. Castellanos-Gomez, J. Quereda, H. P. van der Meulen, N. Agrait, and G. Rubio-Bollinger, "Spatially resolved optical absorption spectroscopy of single- and few-layer
$MoS_2$ by hyperspectral imaging," Nanotechnology 27, 115705 (2016). https://doi.org/10.1088/0957-4484/27/11/115705 -
C. Hsu, R. Frisenda, R. Schmidt, A. Arora, S. M. de Vasconcellos, R. Bratschitsch, H. S. J. van der Zant, and A. Castellanos-Gomez, "Thickness-dependent refractive index of 1L, 2L, and 3L
$MoS_2$ ,$MoSe_2$ ,$WS_2$ , and$WSe_2$ ," Adv. Opt. Mater. 7, 1900239 (2019). https://doi.org/10.1002/adom.201900239 -
H. S. Lee, S.-W. Min, Y.-G. Chang, M. K. Park, T. Nam, H. Kim, J. H. Kim, S. Ryu, and S. Im, "
$MoS_2$ nanosheet phototransistors with thickness-modulated optical energy gap," Nano. Lett. 12, 3695-3700 (2012). https://doi.org/10.1021/nl301485q -
H. Zhang, Y. Ma, Y. Wan, X. Rong, Z. Xie, W. Wang, and L. Dai, "Measuring the refractive index of highly crystalline monolayer
$MoS_2$ with high confidence," Sci. Rep. 5, 8440 (2015). https://doi.org/10.1038/srep08440 -
T. Han, H. Liu, S. Wang, S. Chen, W. Li, X. Yang, M. Cai, and K. Yang, "Probing the optical properties of
$MoS_2$ on$SiO_2$ /Si and sapphire substrates," Nanomaterials 9, 740 (2019). https://doi.org/10.3390/nano9050740 - M. M. Benameur, B. Radisavljevic, J. S. Heron, S. Sahoo, H. Berger, and A. Kis, "Visibility of dichalcogenide nanolayers," Nanotechnology 22, 125706 (2011). https://doi.org/10.1088/0957-4484/22/12/125706
-
B. Radisavljevic, A. Radenovic, J. Brivio, V. Giacometti, and A. Kis, "Single-layer
$MoS_2$ transistors," Nat. Nanotechnol. 6, 147-150 (2011). https://doi.org/10.1038/nnano.2010.279 -
Y.-H. Lee, X.-Q. Zhang, W. Zhang, M.-T. Chang, C.-T. Lin, K.-D. Chang, Y.-C. Yu, J. T.-W. Wang, C.-S. Chang, L.-J. Li, and T.-W. Lin, "Synthesis of large-area
$MoS_2$ atomic layers with chemical vapor deposition," Adv. Mater. 24, 2320-2325 (2012). https://doi.org/10.1002/adma.201104798 -
Y. Yu, Y. Yu, Y. Cai, W. Li, A. Gurarslan, H. Peelaers, D. E. Aspnes, C. G. Van de Walle, N. V. Nguyen, Y.-W. Zhang, and L. Cao, "Exciton-dominated dielectric function of atomically thin
$MoS_2$ films," Sci. Rep. 5, 16996 (2015). https://doi.org/10.1038/srep16996 -
S. K. Kang and H. S. Lee, "Study on growth parameters for monolayer
$MoS_2$ synthesized by CVD using solutionbased metal precursors," Appl. Sci. Converg. Technol. 28, 159-163 (2019). https://doi.org/10.5757/ASCT.2019.28.5.159 - R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland Publishing, Amsterdam, 1987).
- S. Y. Kim, Ellipsometry (Ajou University, Suwon, 2000), Chapter 3-4.
- V. G. Kravets, V. V. Prorok, L. V. Poperenko, and I. A. Shaykevich, "Ellipsometry and optical spectroscopy of lowdimensional family TMDs," Semicond. Phys. Quantum Electron. Optoelectron. 20, 284-296 (2017). https://doi.org/10.15407/spqeo20.03.284
-
C. Yim, M. O'Brien, N. McEvoy, S. Winters, I. Mirza, J. G. Lunney, and G. S. Duesberg, "Investigation of the optical properties of
$MoS_2$ thin films using spectroscopic ellipsometry," Appl. Phys. Lett. 104, 103114 (2014). https://doi.org/10.1063/1.4868108 - H.-L. Liu, C.-C. Shen, S.-H. Su, C.-L. Hsu, M.-Y. Li, and L.-J. Li, "Optical properties of monolayer transition metal dichalcogenides probed by spectroscopic ellipsometry," Appl. Phys. Lett. 105, 201905 (2014). https://doi.org/10.1063/1.4901836
- T. R. Piwonka-Corle, K. F. Scoffone, X. Chen, L. J. Lacomb, Jr., J.-L. Stehle, D. Zahorski, and J.-P. Rey, "Focused beam spectroscopic ellipsometry method and system," U.S. Patent 5608526A (1997).
- J. A. Woollam Co., RC2 Ellipsometer Brochure (2017). Accessed: April 4, 2020 [Online]. Available: https://www.jawoollam.com/download/pdfs/rc2-brochure.pdf.
- S. J. K im a nd M . H. L ee, "Microsp ot sp ectroscopic ellip someter with 4-reflectors," Korean Patent 10-1922973 (2018).
- Y. Xiong, Y. Dai, S. Chen, and G. Tie, "Design and experimental demonstration of coaxially folded all-reflective imaging system," Curr. Opt. Photon. 3, 227-235 (2019). https://doi.org/10.3807/copp.2019.3.3.227
- L. Beiser and R. B. Johnson, "Scanners," in Handbook of Optics, 2nd ed., M. Bass, ed. (McGraw-Hill, NY, 1995), Chapter 19.
- S. J. Kim, H. K. Yoon, M. H. Lee, S. J. Ii, S. Y. Cho, Y. H. Kwon, B. K. Kim, D. H. Bae, J. H. Shin, and S. Y. Kim, "Development and evaluation of micro spot spectroscopic ellipsometer," in Proc. 8th International Conference on Spectroscopic Ellipsometry (Barcelona, Spain, May 2019), p. 152.