Current Optics and Photonics

Optical Society of Korea (한국광학회)
권호 표지
DOI QR코드

DOI QR Code

Interferometric Snapshot Spectro-ellipsometry: Calibration and Systematic Error Analysis

  • Dembele, Vamara (Division of Mechanical System Engineering, Jeonbuk National University) ;
  • Choi, Inho (Division of Mechanical System Engineering, Jeonbuk National University) ;
  • Kheiryzadehkhanghah, Saeid (Division of Mechanical System Engineering, Jeonbuk National University) ;
  • Choi, Sukhyun (Division of Mechanical System Engineering, Jeonbuk National University) ;
  • Kim, Junho (Division of Mechanical System Engineering, Jeonbuk National University) ;
  • Kim, Cheong Song (Division of Mechanical System Engineering, Jeonbuk National University) ;
  • Kim, Daesuk (Division of Mechanical System Engineering, Jeonbuk National University)
  • Received : 2020.02.05
  • Accepted : 2020.04.21
  • Published : 2020.08.25
Download PDF
⟨ Previous Next ⟩

Abstract

We describe a calibration method to improve the accuracy of interferometric snapshot spectroscopic ellipsometry employing a dual-spectrometer sensor scheme. Conventional spectral wavelength calibration of a spectrometer has been performed by using a calibration lamp having multiple peaks at specific wavelength. This paper shows that such a conventional spectrometer calibration method is inappropriate for the proposed interferometric snapshot spectroscopic ellipsometry to obtain highly accurate ellipsometric phase information. And also, systematic error analysis of interferometric snapshot spectroscopic ellipsometry is conducted experimentally.

Keywords

References

  1. K. Riedling, Ellipsometry for Industrial Applications (Springer-Verlag, Wien, 1988).
  2. H. G. Tompkins and W. A. McGahan, Spectroscopic Ellipsometry and Reflectometry: A user's Guide (Wiley, NY, 1999).
  3. D. Aspnes, "Expanding horizons: new developments in ellipsometry and polarimetry," Thin Solid Films 455-456, 3-13 (2004). https://doi.org/10.1016/j.tsf.2003.12.038
  4. A. Dejneka, I. Aulika, V. Trepakov, J. Krepelka, L. Jas trabik, Z. Hubicka, and A. Lynnyk, "Spectroscopic ellipsometry applied to phase transitions in solids: possibilities and limitations," Opt. Express 17, 14322-14338 (2009). https://doi.org/10.1364/OE.17.014322
  5. J. W. Weber, V. E. Calado, and M. C. M. Van de Sanden, "Optical constants of graphene measured by spectroscopic ellipsometry," Appl. Phys. Lett. 97, 091904 (2010). https://doi.org/10.1063/1.3475393
  6. D. E. Aspnes, "Fourier transform detection system for rotating-analyzer ellipsometers," Opt. Commun. 8, 222-225 (1973). https://doi.org/10.1016/0030-4018(73)90132-6
  7. H. Fujiwara, Spectroscopic Ellipsometry: Principles and Applications (John Wiley & Sons, England, 2007).
  8. H. F. Hazebroek and A. A. Holscher, "Interferometric ellipsometry," J. Phys. E: Sci. Instrum. 6, 822 (1973). https://doi.org/10.1088/0022-3735/6/9/013
  9. C.-H. Lin, C. Chou, and K.-S. Chang, "Real time interferometric ellipsometry with optical heterodyne and phase lock-in techniques," Appl. Opt. 29, 5159-5162 (1990). https://doi.org/10.1364/AO.29.005159
  10. K. Oka and T. Kato, "Static spectroscopic ellipsometer based on optical frequency-domain interferometry," Proc. SPIE 4481, 137-140 (2002).
  11. P. Hlubina, D. Ciprian, and J. Lunacek, "Spectral interferometric techniques to measure the ellipsometric phase of a thin-film structure," Opt. Lett. 34, 2661-2663 (2009). https://doi.org/10.1364/OL.34.002661
  12. L. R. Watkins, "Interferometric ellipsometer," Appl. Opt. 47, 2998-3001 (2008). https://doi.org/10.1364/AO.47.002998
  13. D. Kim, M. Jin, W. Chegal, J. Lee, and R. Magnusson, "Calibration of a snapshot phase-resolved polarizationsensitive spectral reflectometer," Opt. Lett. 38, 4829-4832 (2013). https://doi.org/10.1364/OL.38.004829
  14. D. Kim, Y. Seo, Y. Yoon, V. Dembele, J. W. Yoon, K. J. Lee, and R. Magnusson, "Robust snapshot interferometric spectropolarimetry," Opt. Lett. 41, 2318-2321 (2016). https://doi.org/10.1364/OL.41.002318
  15. V. Dembele, M. Jin, B. J. Baek, and D. Kim, "Dynamic spectro-polarimetry based on a modified Michelson interferometric scheme," Opt. Express 24, 14419-14428 (2016). https://doi.org/10.1364/OE.24.014419
  16. V. Dembele, M. Jin, I. Choi, W. Chegal, and D. Kim, "Interferometric snapshot spectro-ellipsometry," Opt. Express 26, 1333-1341 (2018). https://doi.org/10.1364/OE.26.001333
  17. D. Kim and V. Dembele, "One-piece polarizing interferometer for ultrafast spectroscopic polarimetry," Sci. Rep. 9, 5978 (2019). https://doi.org/10.1038/s41598-019-42397-2
  18. V. Dembele, S. Choi, W. Chegal, I. Choi, M. J. Paul, J. Kim, and D. Kim, "Dynamic spectroscopic ellipsometry based on a one-piece polarizing interferometric scheme," Opt. Commun. 454, 124426 (2020). https://doi.org/10.1016/j.optcom.2019.124426
  19. W. G. Henry and M. R. Meharry. "Calibration of a prism spectrometer," J. Opt. Soc. Am. 51, 356-359 (1961). https://doi.org/10.1364/JOSA.51.000356
  20. C.-H. Tseng, J. F. Ford, C. K. Mann, and T. J. Vickers, "Wavelength Calibration of a Multichannel Spectrometer," Appl. Spectrosc. 47, 1808-1813 (1993). https://doi.org/10.1366/0003702934065948
  21. M. Takeda, H. Ina, and S. Kobayashi, "Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry," J. Opt. Soc. Am. 72, 156-160 (1982). https://doi.org/10.1364/JOSA.72.000156
  22. D. Kim, S. Kim, H. J. Kong, and Y. Lee, "Measurement of the thickness profile of a transparent thin film deposited upon a pattern structure with an acousto-optic tunable filter," Opt. Lett. 27, 1893-1895 (2002). https://doi.org/10.1364/OL.27.001893